2017
DOI: 10.1021/acsami.7b01833
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Air-Stable Humidity Sensor Using Few-Layer Black Phosphorus

Abstract: As a new family member of two-dimensional layered materials, black phosphorus (BP) has attracted significant attention for chemical sensing applications due to its exceptional electrical, mechanical, and surface properties. However, producing air-stable BP sensors is extremely challenging because BP atomic layers degrade rapidly in ambient conditions. In this study, we explored the humidity sensing properties of BP field-effect transistors fully encapsulated by a 6 nm-thick AlO encapsulation layer deposited by… Show more

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Cited by 104 publications
(60 citation statements)
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“…Other authors report that the oxidation of BP flakes leads to a decrease of the humidity sensing response of the BP-based sensors. Miao et al [ 220 ], for example, have fabricated a transistor with a mechanically exfoliated flake as sensing material. In order to avoid the degradation of the BP flakes, a 6 nm thick Al 2 O 3 layer has been deposited on the BP flakes and its sensing and conductivity properties have been compared with the ones of a not-capped BP flake.…”
Section: Phosphorene Gas Sensorsmentioning
confidence: 99%
“…Other authors report that the oxidation of BP flakes leads to a decrease of the humidity sensing response of the BP-based sensors. Miao et al [ 220 ], for example, have fabricated a transistor with a mechanically exfoliated flake as sensing material. In order to avoid the degradation of the BP flakes, a 6 nm thick Al 2 O 3 layer has been deposited on the BP flakes and its sensing and conductivity properties have been compared with the ones of a not-capped BP flake.…”
Section: Phosphorene Gas Sensorsmentioning
confidence: 99%
“…In addition to h‐BN nanosheets, the ultrathin conventional dielectric oxides, such as SiO 2 or Al 2 O 3 , can be applied to package the sensitive BP nanosheets as well as improving the performance of the corresponding devices . Recently, a heterostructure of phosphorene sandwiched between two SiO 2 films has been designed and shown arresting stability in ambient for months ( Figure a) .…”
Section: Bp–insulator Heterostructuresmentioning
confidence: 99%
“…For the encapsulation method, encapsulation layers, such as oxidized aluminum (AlO x ),149, 156, 157, 158, 159 h‐BN,151, 160, 161 polymer,100, 162, 163, 164 SiO 2 ,150 MoS 2 ,165 graphene oxide (GO),166 and graphene,161, 167, 168 were widely applied as barriers to protect 2D BP from its structure and chemical degradation. AlO x layer was deposited on BP devices by using the atomic layer deposition (ALD) process, where it can block surface reactions with ambient air.…”
Section: Passivationmentioning
confidence: 99%