1998
DOI: 10.1016/s0925-4005(98)00104-x
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Air sensitive tin dioxide thin films by magnetron sputtering and thermal oxidation technique

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Cited by 40 publications
(9 citation statements)
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“…The electronic state of the material is not directly affected by the additive but the gas to be detected is activated to facilitate its catalytic oxidation at the tin dioxide surface. Pd is known to induce this spill-over effect which may also favor the dissociation and adsorption of oxygen at the functioning temperature of the sensors [23]. …”
Section: Discussionmentioning
confidence: 99%
“…The electronic state of the material is not directly affected by the additive but the gas to be detected is activated to facilitate its catalytic oxidation at the tin dioxide surface. Pd is known to induce this spill-over effect which may also favor the dissociation and adsorption of oxygen at the functioning temperature of the sensors [23]. …”
Section: Discussionmentioning
confidence: 99%
“…[4][5][6][7][8][9][10] Physical vapor deposition ͑PVD͒ methods have been widely used for the fabrication of tin oxide thin films. [11][12][13][14][15] SnO 2 ceramics are commonly used as source material. Under high vacuum conditions and at high temperatures, the gaseous SnO 2 molecules will dissociate and the film material condensed onto the substrate is primarily oxygen deficient.…”
Section: Introductionmentioning
confidence: 99%
“…The usage of FTO broadens in various fields of the technology due to its chemical and thermal stability along with the high optical transparency in the visible range and high electrical conductivity. FTO has been prepared by various methods including chemical vapor deposition, 4 pulsed laser deposition, 5 rf sputtering, 6 sol-gel and spray pyrolysis deposition (SPD). 7 The spray pyrolysis is widely used to prepare FTO films, owing to its simplicity, low-cost experimental apparatus arrangement, readily incorporatability of various dopants, high growth rate and high mass production capability for large area coatings and so on.…”
Section: Introductionmentioning
confidence: 99%