2007
DOI: 10.1016/j.nimb.2007.04.134
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Advanced surface polishing using gas cluster ion beams

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Cited by 12 publications
(3 citation statements)
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“…The atoms present in the workpiece receives the energy transferred from the collided ions at the top surface as shown in figure 22. If the energy level absorbed is insufficient by the workpiece atoms to overcome the lattice binding energy, then the absorbed energy is released in the form of phonons [179].…”
Section: Ion Beam Polishing (Ibp)mentioning
confidence: 99%
“…The atoms present in the workpiece receives the energy transferred from the collided ions at the top surface as shown in figure 22. If the energy level absorbed is insufficient by the workpiece atoms to overcome the lattice binding energy, then the absorbed energy is released in the form of phonons [179].…”
Section: Ion Beam Polishing (Ibp)mentioning
confidence: 99%
“…These ''nano-explosions'' should be disruptive to particulates because they are structurally weak and thermally isolated. The effect of these reactions on the Nb surface is discussed in another paper [19].…”
Section: Nb Materials For Srf Cavitiesmentioning
confidence: 99%
“…Одним из перспективных инструментов модификации поверхности являются пучки газовых кластерных ионов. Показано, что благодаря нелинейным эффектам коллективного взаимодействия падающих кластеров с твердым телом и возможности независимо регулировать их размеры и кинетическую энергию можно сглаживать поверхности различных материалов с минимальным повреждением структуры обрабатываемого материала [4][5][6].…”
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