Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications

Chen, XiuGuo; Gu, Honggang; Liu, JiaMin; Chen, Chao; Liu, Shiyuan

doi:10.1007/s11431-022-2090-4

Cited by 21 publications

(6 citation statements)

References 118 publications

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“…This includes understanding phenomena like birefringence in flexible polymeric substrates or retardance in liquid crystals. By meticulously analyzing the data from the Mueller matrix, researchers may determine factors like the orientation-dependent refractive indices, absorption coefficients, and even the crystal symmetry inherent to anisotropic materials [36].…”

Section: Mueller-matrix Spectroscopic Ellipsometrymentioning

confidence: 99%

Spectroscopic Ellipsometry: Advancements, Applications and Future Prospects in Optical Characterization

Politano,

Versace

2023

Spectroscopy Journal

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Spectroscopic ellipsometry (SE), a non-invasive optical technique, is a powerful tool for characterizing surfaces, interfaces, and thin films. By analyzing the change in the polarization state of light upon reflection or transmission through a sample, ellipsometry provides essential parameters such as thin film thickness (t) and optical constants (n, k). This review article discusses the principles of ellipsometry, including the measurement of key values ∆ and Ψ, and the complex quantity ρ. The article also presents the Fresnel equations for s and p polarizations and the importance of oblique angles of incidence in ellipsometry. Data analysis in ellipsometry is explored, including the determination of bandgap and data referencing the electrical properties of materials. The article emphasizes the importance of choosing the appropriate models to fit ellipsometric data accurately, with examples of the Cauchy and Lorentz models. Additionally, the Kramers–Kronig relations are introduced, illustrating the connection between real and imaginary components of optical constants. The review underscores the significance of ellipsometry as a non-destructive and versatile technique for material characterization across a wide range of applications.

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Section: Mueller-matrix Spectroscopic Ellipsometrymentioning

confidence: 99%

Spectroscopic Ellipsometry: Advancements, Applications and Future Prospects in Optical Characterization

Politano,

Versace

2023

Spectroscopy Journal

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“…From a system design perspective, the incident angle of the laser and the viewing angle of the detectors are crucial factors for achieving optimal scattering distribution, which is critical for detection efficiency [ 12 ]. In addition, exploiting phase [ 13 ] and polarization information [ 14 ] of the light has proved effective in detecting smaller features, thereby improving defect detectability. A high-numerical-aperture (NA) objective lens can collect enough light and improve the SNR, but limit field of view (FOV) and detection efficiency [ 15 ].…”

Section: Introductionmentioning

confidence: 99%

Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy

Yu,

Xu,

Wang

et al. 2024

Sensors

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In semiconductor manufacturing, defect inspection in non-patterned wafer production lines is essential to ensure high-quality integrated circuits. However, in actual production lines, achieving both high efficiency and high sensitivity at the same time is a significant challenge due to their mutual constraints. To achieve a reasonable trade-off between detection efficiency and sensitivity, this paper integrates the time delay integration (TDI) technology into dark-field microscopy. The TDI image sensor is utilized instead of a photomultiplier tube to realize multi-point simultaneous scanning. Experiments illustrate that the increase in the number of TDI stages and reduction in the column fixed pattern noise effectively improve the signal-to-noise ratio of particle defects without sacrificing the detecting efficiency.

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“…These complicate the characterization, measurement, and analysis of vectorial information of skylight, and they distinguish the polarimetry for bionic geolocation applications from polarimetry techniques in other areas. In addition, polarimetry techniques in the field of material [29][30][31][32], biomedical [7,33,34], and remote sensing [35][36][37][38] etc. have been summarized in recent reviews.…”

Section: Introductionmentioning

confidence: 99%

Polarimetry for Bionic Geolocation and Navigation Applications: A Review

Dong

et al. 2023

Remote Sensing

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Polarimetry, which seeks to measure the vectorial information of light modulated by objects, has facilitated bionic geolocation and navigation applications. It is a novel and promising field that provides humans with a remote sensing tool to exploit polarized skylight in a similar way to polarization-sensitive animals, and yet few in-depth reviews of the field exist. Beginning with biological inspirations, this review mainly focuses on the characterization, measurement, and analysis of vectorial information in polarimetry for bionic geolocation and navigation applications, with an emphasis on Stokes–Mueller formalism. Several recent breakthroughs and development trends are summarized in this paper, and potential prospects in conjunction with some cutting-edge techniques are also presented. The goal of this review is to offer a comprehensive overview of the exploitation of vectorial information for geolocation and navigation applications as well as to stimulate new explorations and breakthroughs in the field.

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Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications

Cited by 21 publications

References 118 publications

Spectroscopic Ellipsometry: Advancements, Applications and Future Prospects in Optical Characterization

Spectroscopic Ellipsometry: Advancements, Applications and Future Prospects in Optical Characterization

Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy

Polarimetry for Bionic Geolocation and Navigation Applications: A Review

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