Spectroscopic Ellipsometry: Advancements, Applications and Future Prospects in Optical Characterization
Grazia Giuseppina Politano,
Carlo Versace
Abstract:Spectroscopic ellipsometry (SE), a non-invasive optical technique, is a powerful tool for characterizing surfaces, interfaces, and thin films. By analyzing the change in the polarization state of light upon reflection or transmission through a sample, ellipsometry provides essential parameters such as thin film thickness (t) and optical constants (n, k). This review article discusses the principles of ellipsometry, including the measurement of key values ∆ and Ψ, and the complex quantity ρ. The article also pr… Show more
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