Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping

Brunne, Jens; Wapler, Matthias C.; Wallrabe, Ulrike; Treffer, Alexander; Böck, Martin; Grünwald, R.

doi:10.1109/isot.2012.6403249

Cited by 2 publications

(2 citation statements)

References 6 publications

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“…Recently, we proposed the use of an adaptive Fresnel mirror for direct nanomachining of sub-wavelength structures into silicon or dielectric substrates by laser-induced periodic surface structures (LIPSS), generated by femtosecond laser pulses [9][10][11]. In this application, the Fresnel mirror is intended to deliver a sharp line pattern, while introducing only a minimal amount of optical dispersion into the system.…”

Section: Introductionmentioning

confidence: 99%

A tunable piezoelectric Fresnel mirror for high-speed lineshaping

Brunne

Wapler

Grünwald

et al. 2013

J. Micromech. Microeng.

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We present the first tunable v-shaped mirror, also known as Fresnel mirror, that may be used to generate a quasi-nondiffracting line pattern, for example for applications in laser lithography or nanomachining with femtosecond lasers. The aperture of the device is 5 mm with a surface flatness of better than λ/10, and the range of the tilting angle is 1.3–38 mrad, resulting in a fringe spacing of 123 μm down to 4.2 μm for red light at 633 nm. In contrast to usual cantilever-comb setups, the mirrors are supported on a PDMS layer and tilted by a single piezoelectric actuator, providing a high resonance frequency of 5.1 kHz. The device is fabricated using laser rapid prototyping of silicon and a casting processes of soft polymers. We show the static and dynamic characterization of the mirror and the verification of the optical functionality.

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Section: Introductionmentioning

confidence: 99%

A tunable piezoelectric Fresnel mirror for high-speed lineshaping

Brunne

Wapler

Grünwald

et al. 2013

J. Micromech. Microeng.

Self Cite

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“…purely reflective), axicon-like shapers of large phase difference based on fast switching designs. Recently we reported on several new approaches of such components [27][28][29] which are also capable to generate ultrashort-pulsed nondiffracting light-sheets at high intensities, extremely short pulse durations and high switching frequencies.…”

Section: Introductionmentioning

confidence: 99%

MEMS axicons for nondiffracting line shaping of ultrashort pulses

Treffer

Das

Böck

et al. 2013

Complex Light and Optical Forces VII

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For a growing number of applications in nonlinear spectroscopy, micro-and nano-machining, optical data processing, metrology or medicine, an adaptive shaping of ultrashort pulsed, ultrabroadband laser beams into propagation-invariant linear focal zones is required. One example is the femtosecond laser high-speed large area nanostructuring with moving substrates and cylindrical optics we reported about recently. Classical microoptical systems, however, distort the temporal pulse structure of few cycle pulses by diffraction and dispersion. The temporal pulse transfer can be improved with innovative types of reflective MEMS axicons based on two integrated rectangular mirrors tilted by piezo-actuators. In contrast to pixelated liquid-crystal-on-silicon (LCoS) based devices, cutoff frequencies in multi-kilohertz range, a purely reflective setup and continuous profiles with larger phase shift are realized which enable for shaping extended propagation-invariant zones at a faster and more robust operation. Additionally, a fixed phase offset can be part of the structure. Here, the performance of a prototype of linear mechanically tunable MEMS axicon is demonstrated by generating a pseudo-nondiffracting line focus of variable diameter and depth extension from a femtosecond laser pulse. The temporal transfer of 6-fs pulses of a Ti:sapphire laser oscillator is characterized with spectral phase interferometry for direct electric-field reconstruction (SPIDER) and spatially resolved nonlinear autocorrelation. Spatial and temporal self-reconstruction properties were studied. The application of the flexible focus to the excitation of plasmon-polaritons and the self-organized formation of coherently linked deep sub-wavelength laser-induced periodic surface structures (LIPSS) in semiconductors and dielectrics is reported.

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Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping

Cited by 2 publications

References 6 publications

A tunable piezoelectric Fresnel mirror for high-speed lineshaping

A tunable piezoelectric Fresnel mirror for high-speed lineshaping

MEMS axicons for nondiffracting line shaping of ultrashort pulses

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