Actuators for Micropositioners and Nanopositioners

Hubbard, Neal Benson; Culpepper, Martin L.; Howell, Larry L.

doi:10.1115/1.2345371

Cited by 89 publications

(57 citation statements)

References 52 publications

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“…This section briefly introduces four kinds of actuators, which are popularly adopted in micro-/nano-positioning stage design [11,18]. The classification is based on their working principles, i.e., electromagnetic, electrostatic, electrothermal and piezoelectric effects.…”

Section: Actuatorsmentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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Section: Actuatorsmentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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“…H IGH-PRECISION nanopositioners have been used extensively in many applications such as scanning probe microscopy [1], atomic force microscopy [2], and emerging ultrahigh-density probe storage systems [3], [4]. Closed-loop feedback control of the positioners is highly desirable if a high degree of displacement precision is required, and such a control system needs an accurate source of position information [5], [6].…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner

Zhu

Moheimani

Yuce

2011

IEEE Electron Device Lett.

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Abstract-This letter reports a micromachined nanopositioner with capacitive actuation together with capacitive and electrothermal sensing on a single chip. With the actuation voltage of 60 V, the electrostatic actuator can achieve a maximum displacement of 2.32 μm. The displacement can be simultaneously measured using capacitive and electrothermal sensors. Both sensors are calibrated to operate at a sensitivity of 0.0137 V/V. The electrothermal sensor is found to display 1/f noise, which affects the low-frequency measurements obtained from this device. However, at higher frequencies, it displays a lower noise power spectral density when compared with the capacitive sensor. The comparisons of frequency responses, power consumptions, and noise performances are presented in this letter.Index Terms-Capacitive position sensing, electrothermal position sensing, micromachined nanopositioner, sensor fusion.

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“…Micro/nano positioning platforms play an increasingly important role in the domains of mechanics, biology, materials, physics and chemistry. Typical applications touch lithography, scanning probe microscopy, space flexible manipulators, ultra-precision machine tools and so on [3][4][5][6]. Piezoelectric actuators (PEAs) are widely applied in micro/nano positioning platforms, because of their high hardness, fast response and other outstanding features.…”

Section: Introductionmentioning

confidence: 99%

Recent Advances in the Control of Piezoelectric Actuators

Chi

2014

International Journal of Advanced Robotic Systems

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The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed.

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Actuators for Micropositioners and Nanopositioners

Cited by 89 publications

References 52 publications

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Simultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner

Recent Advances in the Control of Piezoelectric Actuators

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