2019
DOI: 10.1364/oe.27.025920
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Actively-monitored periodic-poling in thin-film lithium niobate photonic waveguides with ultrahigh nonlinear conversion efficiency of 4600 %W−1cm−2

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Cited by 120 publications
(72 citation statements)
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“…One of the main advantages of this method is the ease of processing. Several materials have been pursued in this regard, such as tantalum pentoxide (Ta 2 O 5 ), [29] chalcogenide glass (ChG), [70] silicon nitride (SiN, Si 3 N 4 ), [41,71,72,81,85,100,101,124] and titanium dioxide (TiO 2 ), [40] with reported propagation loss values as low as ∼1 dB cm −1 for plasma-enhanced chemical-vapor deposition Figure 3a), [71] dry-etched ( Figure 3b), [75,78] and SOI-bonded ( Figure 3d) [76,77,80,84] methods, while for nonlinear devices, rib-loaded [100,101] and dry-etched [102,105] have been the most commonly employed platforms. In comparison to platforms (a)-(c), platform (d) requires additional bonding and TFLN substrate removal steps.…”
Section: Ultracompact Waveguidesmentioning
confidence: 99%
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“…One of the main advantages of this method is the ease of processing. Several materials have been pursued in this regard, such as tantalum pentoxide (Ta 2 O 5 ), [29] chalcogenide glass (ChG), [70] silicon nitride (SiN, Si 3 N 4 ), [41,71,72,81,85,100,101,124] and titanium dioxide (TiO 2 ), [40] with reported propagation loss values as low as ∼1 dB cm −1 for plasma-enhanced chemical-vapor deposition Figure 3a), [71] dry-etched ( Figure 3b), [75,78] and SOI-bonded ( Figure 3d) [76,77,80,84] methods, while for nonlinear devices, rib-loaded [100,101] and dry-etched [102,105] have been the most commonly employed platforms. In comparison to platforms (a)-(c), platform (d) requires additional bonding and TFLN substrate removal steps.…”
Section: Ultracompact Waveguidesmentioning
confidence: 99%
“…[120] As depicted in Figure 3b, dry-etched waveguides have been also utilized for TFLN EO modulators (EOMs) [73][74][75]78] and nonlinear devices. [100][101][102]105] For EOMs, in comparison with rib-loading, this approach provides higher optical confinement in LN, which can consequently result in smaller electrode gaps in MZ-based devices, hence reducing the EOM's V . However, in the presence of certain requirements due to ultrahigh-speed design, the ribloaded method is more advantageous due to the lower dielectric constant of the rib compared to that of LN.…”
Section: Ultracompact Waveguidesmentioning
confidence: 99%
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