1987
DOI: 10.1063/1.98502
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Acoustic investigation of the elastic properties of ZnO films

Abstract: The elastic properties of ZnO films deposited by rf magnetron sputtering on Al2O3 substrates have been analyzed by means of an acoustic investigation technique. The phase velocities of a spectrum of acoustic modes propagating along the layered structure have been measured and the results exploited for determining the complete set of elastic constants of the film. The effective constants of the film are lower than those of the bulk material by amounts which depend on the elastic constant considered and range fr… Show more

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Cited by 126 publications
(47 citation statements)
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“…Using this technique, the estimated direct piezoelectric constant was e 31 =.0377 C/m 2 . This was about an order of magnitude smaller than that reported in the literature [13,14].…”
Section: Zno Film Characterizationcontrasting
confidence: 50%
“…Using this technique, the estimated direct piezoelectric constant was e 31 =.0377 C/m 2 . This was about an order of magnitude smaller than that reported in the literature [13,14].…”
Section: Zno Film Characterizationcontrasting
confidence: 50%
“…From a theoretical perspective point of view, we believe that this effect can also contribute to the larger piezoelectric coefficients measured in ZnO NWs [21] compared to those of ZnO thin films. [45] Indeed, in addition to possible nonlinear effects which are more likely to be present in thin NWs, [46] part of the improvement could be associated to the surface depletion effects enlightened in this paper. From an application point of view, an additional advantage is that the response of such a NW-based composite can be improved by increasing NW length while increasing a thin film thickness would be ineffective.…”
Section: Comparison With a Zno Thin Filmmentioning
confidence: 99%
“…Owing to their high conductivity and transparency in the visible wavelength region, they have been used in optical and electronic devices such as surface acoustic wave devices (SAW), display panels, solar cells, and ultraviolet (UV) light emitting diodes [1][2][3][4][5][6]. Indium tin oxide (ITO) is used for most of the TCO applications [7].…”
Section: Introductionmentioning
confidence: 99%