Absolute metrology method of the x-ray mirror with speckle scanning technique

Xue, Lian; Li, Zhongliang; Zhou, Tao; Dong, Xiaohao; Luo, Hongxin; Wang, Hongchang; Sawhney, Kawal; Wang, Jie

doi:10.1364/ao.58.008658

Cited by 4 publications

(6 citation statements)

References 21 publications

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“…However, this is not the case for X-ray reflective mirrors due to the small grazing-incidence angle. Only 1D slope errors of the X-ray mirror were retrieved in the previous work (Xue et al, 2019), whereas here we extend the absolute measurement for X-ray reflective mirrors to the 2D case. The misalignment of the roll angle of the mirror can create artificial features in the 2D map of the wavefront slope error.…”

Section: Introductionmentioning

confidence: 94%

“…In general, the various speckle-based methods can be divided into two measurement modes: the differential mode (Wang, Kashyap & Sawhney, 2015a;Xue et al, 2019) and the self-reference mode (Berujon et al, 2014;. For the self-reference mode, only one image stack is collected with the optic being tested placed in the X-ray beam while the speckle generator is scanned.…”

Section: Principles Of the 2d Wavefront Slope Error Measurementmentioning

confidence: 99%

“…Among them, specklebased methods (Wang et al, 2015;Berujon et al, 2014Berujon et al, , 2020aZhou, Wang, Fox et al, 2018;Wang, Kashyap & Sawhney, 2015a) have become popular due to their relative simplicity in terms of experimental setup, relatively short data acquisition time and less stringent requirement for transverse coherence. Speckle-based at-wavelength metrology has been used for the measurement of X-ray reflecting mirrors Xue et al, 2019); although, in these cases, either the influence of any wavefront error derived from the incident beam was ignored or a reliable 2D map of the wavefront slope error was not produced (Xue et al, 2019). The wavefront error resulting from imperfections of upstream optics on a beamline can introduce significant systematic error for measurements of super-polished X-ray mirrors with slope errors <100 nrad.…”

Section: Introductionmentioning

confidence: 99%

“…The absolute measurement of X-ray optics, which separates the wavefront errors derived from the tested optics from those derived from upstream optics, is often desirable. Although absolute measurements of refractive optics have become routine (Berujon et al, 2013;Wang, Kashyap & Sawhney, 2015a), absolute measurements of reflective optics have only been proposed recently (Xue et al, 2019). For X-ray refractive optics, the tested optics are usually assumed to be thin samples.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics

Hu¹,

Wang²,

Fox³

et al. 2022

J Synchrotron Radiat

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Speckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1D information typically output from speckled-based methods, a 2D map is more informative for understanding the overall quality of the optic being tested. In this paper, we propose a method for in situ 2D absolute metrology of weakly focusing X-ray mirrors. Importantly, the angular misalignment of the mirror can be easily corrected with the proposed 2D processing procedure. We hope the speckle pattern data processing method presented here will help to extend this technique to wider applications in the synchrotron radiation and X-ray free-electron laser communities.

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Section: Introductionmentioning

confidence: 94%

Section: Principles Of the 2d Wavefront Slope Error Measurementmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics

Hu¹,

Wang²,

Fox³

et al. 2022

J Synchrotron Radiat

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show abstract

“…The speckle-based X-ray crystal diffraction wavefront measurement technology proposed in this study is referred to as absolute metrology technology, which has been successfully used to characterize reflective optical elements such as X-ray mirrors [26]. The principle of this technique was developed on the basis of the XST method.…”

Section: Principlesmentioning

confidence: 99%

Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

Xue

Luo

Diao

et al. 2020

Sensors

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A speckle-based method for the X-ray crystal diffraction wavefront measurement is implemented, and the slope errors of channel-cut crystals with different surface characteristics are measured. The method uses a speckle scanning technique generated by a scattering membrane translated using a piezo motor to infer the deflection of X-rays from the crystals. The method provides a high angular sensitivity of the channel-cut crystal slopes in both the tangential and sagittal directions. The experimental results show that the slope error of different cutting and etching processes ranges from 0.25 to 2.98 μrad. Furthermore, the results of wavefront deformation are brought into the beamline for simulation. This method opens up possibilities for new high-resolution applications for X-ray crystal diffraction wavefront measurement and provides feedback to crystal manufacturers to improve channel-cut fabrication.

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Characterization of the error of the speckle-based wavefront metrology device at Shanghai Synchrotron Radiation Facility

Xue

et al. 2023

Review of Scientific Instruments

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A metrology device based on the near-field speckle technique was developed in the x-ray test beamline at the Shanghai Synchrotron Radiation Facility to meet the at-wavelength detection requirements of ultra-high-precision optical elements. Different sources of error that limit the uncertainty of the instrument were characterized. Two main factors that contribute to the uncertainty of the measurements were investigated: (1) noise errors introduced by the electronics and the errors introduced by the algorithm and (2) stability errors owing to environmental conditions. The results show that the high measurement stability of the device is realized because it is insensitive to the effect of the external environment. The repetition accuracy of the device achieved 9 nrad (rms) when measuring the planar mirror that produces weak phase curvature.

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Absolute metrology method of the x-ray mirror with speckle scanning technique

Cited by 4 publications

References 21 publications

Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics

Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics

Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

Characterization of the error of the speckle-based wavefront metrology device at Shanghai Synchrotron Radiation Facility

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