Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

Abstract

A speckle-based method for the X-ray crystal diffraction wavefront measurement is implemented, and the slope errors of channel-cut crystals with different surface characteristics are measured. The method uses a speckle scanning technique generated by a scattering membrane translated using a piezo motor to infer the deflection of X-rays from the crystals. The method provides a high angular sensitivity of the channel-cut crystal slopes in both the tangential and sagittal directions. The experimental results show that the slope error of different cutting and etching processes ranges from 0.25 to 2.98 μrad. Furthermore, the results of wavefront deformation are brought into the beamline for simulation. This method opens up possibilities for new high-resolution applications for X-ray crystal diffraction wavefront measurement and provides feedback to crystal manufacturers to improve channel-cut fabrication.

Special Issue “EUV and X-ray Wavefront Sensing”

“…The authors from [ 5 ] presented a study on an in-situ speckle-scanning-based technique for the measurement of the X-ray crystal diffraction wavefront and the characterization of the slope error of channel-cut crystals, with different surface characteristics. This method elucidates possibilities to take new high-resolution X-ray crystal diffraction wavefront measurement and provide feedback to crystal manufacturers to improve channel-cut fabrication.…”

Адаптивная И Активная Рентгеновская Оптика

“…Недавно разработанный метод метрологии, основанный на рентгеновских спеклах, оказался перспективным благодаря простоте экспериментальной установки, высокого углового разрешения и умеренным требованиям к механической стабильности [137][138][139][140][141][142][143][144].…”

“…В дифференциальном методе бо-Оптика и спектроскопия, 2022, том 130, вып. 8 лее высокое пространственное разрешение может быть получено путем сканирования фазового модулятора поперек пучка, поскольку для корреляции используются подмножества, содержащие больше пикселей [144].…”

Adaptive and active X-ray optics

“…The newly developed metrology method, based on X-ray speckles, has proved promising due to the ease of experimental installation, high angular resolution and moderate requirements for mechanical stability [137][138][139][140][141][142][143][144].…”

“…In the absolute method, correlation analysis is used to compare speckled pictures obtained with and without the object. In the differential method, a higher spatial resolution can be obtained by scanning the phase modulator across the bundle, as the correlation uses subsets containing more pixels [144].…”