2022
DOI: 10.1107/s160057752200916x
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Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics

Abstract: Speckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1D information typically output from speckled-based methods, a 2D map is more informative for understanding the overall quality of the optic being tested. In this paper, we propose a method for in situ 2D absolute me… Show more

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Cited by 3 publications
(1 citation statement)
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“…Recent advances in such ex situ techniques include stitching of Fizeau interferograms to form a composite image of X-ray optics for the identification of defects during fabrication or repolishing of mirrors (Huang et al, 2020;da Silva et al, 2023). However, the effectiveness of ex situ metrology is somewhat limited as it cannot account for thermal distortion of optics under beamline conditions (Hu et al, 2022). The effects of beamline conditions and on distortion of the optical surface have been investigated extensively (Zhang et al, 2013;Chumakov et al, 2014;Brumund et al, 2021).…”
Section: Introductionmentioning
confidence: 99%
“…Recent advances in such ex situ techniques include stitching of Fizeau interferograms to form a composite image of X-ray optics for the identification of defects during fabrication or repolishing of mirrors (Huang et al, 2020;da Silva et al, 2023). However, the effectiveness of ex situ metrology is somewhat limited as it cannot account for thermal distortion of optics under beamline conditions (Hu et al, 2022). The effects of beamline conditions and on distortion of the optical surface have been investigated extensively (Zhang et al, 2013;Chumakov et al, 2014;Brumund et al, 2021).…”
Section: Introductionmentioning
confidence: 99%