Abrasive slurry jet micro-machining of holes in brittle and ductile materials

Kowsari, Kavin; Nouraei, H.; James, David F.; Spelt, J.K.; Papini, M.

doi:10.1016/j.jmatprotec.2014.04.008

Cited by 50 publications

(22 citation statements)

References 17 publications

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“…Techniques similar to abrasive jet machining have been reported [ 31 , 32 , 33 ]. These methods include abrasive slurry jet micromachining (ASJM) and abrasive water jet micromachining (AWJM) which make use of abrasive slurries or water to machine blind and through holes in glass.…”

Section: Common Glass Micro-drilling Techniquesmentioning

confidence: 99%

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Micro-Hole Drilling on Glass Substrates—A Review

Hof

Ziki

2017

Micromachines

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Glass micromachining is currently becoming essential for the fabrication of micro-devices, including micro- optical-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (μTAS) and microfluidic devices for biosensing. Moreover, glass is radio frequency (RF) transparent, making it an excellent material for sensor and energy transmission devices. Advancements are constantly being made in this field, yet machining smooth through-glass vias (TGVs) with high aspect ratio remains challenging due to poor glass machinability. As TGVs are required for several micro-devices, intensive research is being carried out on numerous glass micromachining technologies. This paper reviews established and emerging technologies for glass micro-hole drilling, describing their principles of operation and characteristics, and their advantages and disadvantages. These technologies are sorted into four machining categories: mechanical, thermal, chemical, and hybrid machining (which combines several machining methods). Achieved features by these methods are summarized in a table and presented in two graphs. We believe that this paper will be a valuable resource for researchers working in the field of glass micromachining as it provides a comprehensive review of the different glass micromachining technologies. It will be a useful guide for advancing these techniques and establishing new hybrid ones, especially since this is the first broad review in this field.

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Section: Common Glass Micro-drilling Techniquesmentioning

confidence: 99%

“…In ASJM, a slurry with abrasive particles (typically 1 wt % 10 μm Al 2 O 3 particles [ 33 ]) is pumped through a small orifice (~180 μm) and the derived jet is directed to the workpiece causing material removal. ASJM operates normally at pressures of 1 MPa to 14 MPa [ 32 ].…”

Section: Common Glass Micro-drilling Techniquesmentioning

confidence: 99%

Micro-Hole Drilling on Glass Substrates—A Review

Hof

Ziki

2017

Micromachines

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“…Abrasive water jet drilling of exotic materials has seldom been studied but there are other common materials on which the studies have been conducted [8] [7]. AWJM is also good tool for the machining of glass and a work on it reported that polymer based abrasives produce better quality holes [9] [10].…”

Section: Introductionmentioning

confidence: 99%

Genetic algorithm model for abrasive water jet machining of Inconel 617

Nair¹,

Kumanan²

2019

IJEAT

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This article details the methodology for the development of a multi objective optimization model for the abrasive water jet machining of Inconel 617. Genetic algorithm is the tool used for the optimization process. Abrasive water jet drilling of Inconel 617 is conducted using the Taguchi design of experiments. The various input factors considered are water pressure, abrasive flow volume and standoff distance. The responses selected for this study are overcut, circularity and drill rate. A simultaneous multi optimization model is developed using genetic algorithm. The optimization is done with four stages where in different weightages are added to the input factors and the results have been reported.

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“…Slurry flow through hydro-transport systems causes erosive and abrasive wear on pipelines, valves and pumps [1][2][3][4][5]. It becomes essential to design slurry flow that would reduce wear without compromising transport efficiency.…”

Section: Introductionmentioning

confidence: 99%