Micro-Hole Drilling on Glass Substrates—A Review

Hof, Lucas A.; Ziki, Jana D. Abou

doi:10.3390/mi8020053

Cited by 88 publications

(43 citation statements)

References 113 publications

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“…However, laser processing usually requires substantial post processing if surfaces of optical quality are required. Industrially established subtractive machining techniques for fused silica include drilling, ultrasonic machining, powder blasting, and water jetting . However, these methods produce only simple geometries and coarse surfaces not compatible with optical applications.…”

mentioning

confidence: 99%

Glassomer—Processing Fused Silica Glass Like a Polymer

et al. 2018

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Fused silica glass is one of the most important high-performance materials for scientific research, industry, and society. However due to its high chemical and thermal resistance as well as high hardness, fused silica glass is notoriously difficult to structure. This work introduces Glassomer, a solid nanocomposite, which can be structured using polymer molding and subtractive technologies at submicrometer resolution. After polymer processing Glassomer is turned into optical grade fused silica glass during a final heat treatment. The resulting glass has the same optical transparency as commercial fused silica and a smooth surface with a roughness of a few nanometers. This work makes high-performance fused silica glass components accessible to high-throughput fabrication technologies and will enable numerous optical, photonic and medical applications in science and industry.

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confidence: 99%

Glassomer—Processing Fused Silica Glass Like a Polymer

et al. 2018

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“…Therefore, one approach to improve the performance of the current design is to design a gyroscope with less thickness, in which both the device patterning can be accurate and the electrical feedthrough can be minimized. Another approach is to pattern the thick PZT block using low-temperature laser cutting, which may result in a dimension error within 10 μm in this case [ 30 ].…”

Section: Discussionmentioning

confidence: 99%

Design, Fabrication, and Modeling of a Novel Dual-Axis Control Input PZT Gyroscope

Chang

Chen

2017

Sensors

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Conventional gyroscopes are equipped with a single-axis control input, limiting their performance. Although researchers have proposed control algorithms with dual-axis control inputs to improve gyroscope performance, most have verified the control algorithms through numerical simulations because they lacked practical devices with dual-axis control inputs. The aim of this study was to design a piezoelectric gyroscope equipped with a dual-axis control input so that researchers may experimentally verify those control algorithms in future. Designing a piezoelectric gyroscope with a dual-axis control input is more difficult than designing a conventional gyroscope because the control input must be effective over a broad frequency range to compensate for imperfections, and the multiple mode shapes in flexural deformations complicate the relation between flexural deformation and the proof mass position. This study solved these problems by using a lead zirconate titanate (PZT) material, introducing additional electrodes for shielding, developing an optimal electrode pattern, and performing calibrations of undesired couplings. The results indicated that the fabricated device could be operated at 5.5±1 kHz to perform dual-axis actuations and position measurements. The calibration of the fabricated device was completed by system identifications of a new dynamic model including gyroscopic motions, electromechanical coupling, mechanical coupling, electrostatic coupling, and capacitive output impedance. Finally, without the assistance of control algorithms, the “open loop sensitivity” of the fabricated gyroscope was 1.82 μV/deg/s with a nonlinearity of 9.5% full-scale output. This sensitivity is comparable with those of other PZT gyroscopes with single-axis control inputs.

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“…Depending on the range of hole diameters, aspect ratios and surface roughness, there are a wide variety of conventional and non-conventional drilling techniques [27] that can be used to drill glass wafers. In our fabrication, we use mechanical drilling and the CE reservoirs were drilled with 1.5 mm diameter diamond bits on CNC mill.…”

Section: Methodsmentioning

confidence: 99%

Fabrication of high-quality glass microfluidic devices for bioanalytical and space flight applications

et al. 2020

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Microfabricated glass microfluidic and Capillary Electrophoresis (CE) devices have been utilized in a wide variety of applications over the past thirty years. At the Berkeley Space Sciences Laboratory, we are working to further expand this technology by developing analytical instruments to chemically explore our solar system. This effort requires improving the quality and reliability of glass microfabrication through quality control procedures at every stage of design and manufacture. This manuscript provides detailed information on microfabrication technology for the production of high-quality glass microfluidic chips in compliance with industrial standards and space flight instrumentation quality control. The methodological protocol provided in this paper includes the scope of each step of the manufacturing process, materials and technologies recommended and the specific challenges that often confront the process developer. Types and sources of fabrication error at every stage have been identified and their solutions have been proposed and verified. We present robust and rigorous manufacturing and quality control procedures that will assist other researchers in achieving the highest possible quality glass microdevices using the latest apparatus in a routine and reliable fashion.

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Micro-Hole Drilling on Glass Substrates—A Review

Cited by 88 publications

References 113 publications

Glassomer—Processing Fused Silica Glass Like a Polymer

Glassomer—Processing Fused Silica Glass Like a Polymer

Design, Fabrication, and Modeling of a Novel Dual-Axis Control Input PZT Gyroscope

Fabrication of high-quality glass microfluidic devices for bioanalytical and space flight applications

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