2000
DOI: 10.1016/s0169-4332(99)00379-7
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Ablation study on pulsed KrF laser annealed electroluminescent ZnS:Mn/Y2O3 multilayers deposited on Si

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Cited by 7 publications
(7 citation statements)
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“…This behavior is attributed to the low sublimation temperature of ZnS. According to theoretical calculations the laser intensity threshold value to reach the sublimation temperature of ZnS:Mn thin films under KrF*, 248 nm wavelength excimer laser irradiation is around 16.6 MW cm −2 , in agreement with the threshold determined experimentally, around 15 MW cm −2 32.…”
Section: Resultssupporting
confidence: 85%
“…This behavior is attributed to the low sublimation temperature of ZnS. According to theoretical calculations the laser intensity threshold value to reach the sublimation temperature of ZnS:Mn thin films under KrF*, 248 nm wavelength excimer laser irradiation is around 16.6 MW cm −2 , in agreement with the threshold determined experimentally, around 15 MW cm −2 32.…”
Section: Resultssupporting
confidence: 85%
“…We believe that this behavior is inherent to the allotropic transition itself due to the thermal energy used during the solid-state transformation ͑latent heat͒. In a previous ablation rate study, 7 we also suggested that when significant absorption of radiation is providing the latent heat of phase transformation, the surface temperature might be lowered as well. In Ref.…”
Section: A the Structural Dependence Of The Zns:mnõy 2 O 3 Multilayementioning
confidence: 84%
“…Based on the results of a thermal model that we described in a previous work, 7 Fig. 1 shows the calculated maximal transient temperatures attained at the phosphor ͑ZnS:Mn͒ layer surface and at the phosphor/insulator interface, as a function of incident laser power density.…”
Section: A Thermal Simulation Of the Pulsed Laser Annealing Processingmentioning
confidence: 99%
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“…After applying a single shot of KrF laser illumination, the metal film is transformed into metal NPs. [18][19][20] The illuminated area, therefore, presents many NPs on its surface, whereas the non-illuminated area remains as a thin metal film. During the subsequent chemical etching process, the metal NPs act as etching catalysts to form well-positioned, ordered 1D silicon nanostructures only on the areas in which the NPs had been distributed.…”
Section: Introductionmentioning
confidence: 99%