2013
DOI: 10.1063/1.4813739
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A versatile ultra high vacuum sample stage with six degrees of freedom

Abstract: We describe the design and practical realization of a versatile sample stage with six degrees of freedom. The stage was designed for use in a Low Energy Electron Microscope, but its basic design features will be useful for numerous other applications. The degrees of freedom are X, Y, and Z, two tilts, and azimuth. All motions are actuated in an ultrahigh vacuum base pressure environment by piezoelectric transducers with integrated position sensors. The sample can be load-locked. During observation, the sample … Show more

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Cited by 8 publications
(6 citation statements)
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“…To enable high resolution, large field-of-view LEEM imaging, the LEEM sample stage 52 was scanned in a rectangular pattern over the sample, taking an image at each position, leaving sufficient overlap (2 μm steps at a 4.7 μm field-of-view). To obtain meaningful deformation information from this, care needs to be taken to use a stitching algorithm that does not introduce additional deformation, i.e., as faithfully reproducing reality as the constituting images.…”
Section: Methodsmentioning
confidence: 99%
“…To enable high resolution, large field-of-view LEEM imaging, the LEEM sample stage 52 was scanned in a rectangular pattern over the sample, taking an image at each position, leaving sufficient overlap (2 μm steps at a 4.7 μm field-of-view). To obtain meaningful deformation information from this, care needs to be taken to use a stitching algorithm that does not introduce additional deformation, i.e., as faithfully reproducing reality as the constituting images.…”
Section: Methodsmentioning
confidence: 99%
“…To enable high resolution, large field-of-view LEEM imaging, the LEEM sample stage [47] was scanned in a rectangular pattern over the sample, taking an image at each position, leaving sufficient overlap (2 µm steps at a 4.7 µm field-of-view). To obtain meaningful deformation information from this, care needs to be taken to use a stitching algorithm that does not introduce additional deformation, i.e.…”
Section: Stitchingmentioning
confidence: 99%
“…2a). A bayonet fitting at the side of the cap allows for in situ mounting of the puck on the macor carrier piece [19].…”
Section: Leep Sample Holder and Electronicsmentioning
confidence: 99%
“…It contains an electron bombardment heater for temperatures up to 1450 K, fits onto the existing SPECS sample holder (described in Ref. [19]) and is only ≈ 1 cm 3 small (cf. Fig.…”
Section: Leep Sample Holder and Electronicsmentioning
confidence: 99%