A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method

Abstract

Thin film SMAs have the potential to became a primary actuating mechanism for micropumps. In this study, a micropump driven by TiNiCu shape memory thin film is designed and fabricated. The micropump is composed of a TiNiCu/Si bimorph driving membrane, a pump chamber and two inlet and outlet check valves. The property of TiNiCu films and driving capacity of TiNiCu/Si bimorph driving membrane are investigated. The film surface shows a smooth and featureless morphology without any cracks, and the hysteresis width ÁT of TiNiCu film is about 9 C. By using the recoverable force of TiNiCu thin film and biasing force of silicon membrane, the actuation diaphragm realizes reciprocating motion effectively. Experimental results show that the micropump driving by TiNiCu film has good performance, such as high pumping yield, high working frequency, stable driving capacity, and long fatigue life time.

Selective leaching and surface properties of Ti50Ni50−xCux (x=0–20at.%) shape memory alloys for biomedical applications

“…They reported that TiNi binary SMAs exhibited fewer morphological changes and a lower reduction of dehydrogenase activity of epithelia cell cultures than did TiNiCu ternary SMAs, indicating that the release of the Cu ions may lead to a higher cytotoxicity of TiNiCu SMAs. Zhang et al [20] reported a TiNiCu thin-film micropump made by magnetron co-sputtered method. According to their study, the TiNiCu thin-film micropump exhibited a high pumping yield, high working frequency, stable driving capacity, and long fatigue lifetime.…”

Recrystallization of a Ti-45Ni-5Cu cold-worked shape memory alloy characterized by thermoelectric power and electrical properties

“…Their martensitic transformation temperatures (M s ) are close to room temperature. Moreover, the addition of Cu is very important for applications in robotic devices or actuators 5,6 because it inhibits the formation of R-phase which is an undesirable phase that causes a nonlinear correlation between the strain (ε) and the change in electrical resistivity (Δr/r 0 ). When 5 % at.…”

“…When 5 % at. of Cu is added, a linear correlation is achieved, which allows very good control of the position of the actuator [2][3][4][5][6][7][8] . The correlation study of the microstructural evolution during the recovery process after an "amorphization" with mechanical, electrical and thermal properties is important for the applications of Ti-Ni-Cu system, because by controlling the microstructure with the thermomechanical treatment, the mechanical or electrical response of the alloy can be predicted, for example the position of an actuator.…”

A low temperature in-situ crystalline TiNi shape memory thin film deposited by magnetron sputtering

“…Several methods have been used to produce these films. Magnetron sputtering is the most suitable method due to lower contamination and high purity films and adjustment of the atomic ratio, growing structure and film thicknesses by controlling the deposition parameters [5][6][7][8][9]. The basis of the shape memory is the transformation of phases [10].…”