A system for measuring surface roughness by total integrated scattering

Mažulė, Lina; Liukaityte, Simona; Eckardt, R. C.; Melninkaitis, Andrius; Balachninaitė, Ona; Sirutkaitis, Valdas

doi:10.1088/0022-3727/44/50/505103

Cited by 18 publications

(7 citation statements)

References 22 publications

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“…The brightness, shape and contrast of the speckles generated by the coherent wave can effectively reflect the distribution of surface roughness. Light scattering measurement mainly includes the angle resolved scattering (ARS) measurement and total integrated scattering (TIS) measurement [ 83 ] . ARS determines the roughness according to the distribution of the scattered light intensity in the plane [ 84 ] , while TIS determines the roughness according to the ratio of the light intensity in the hemisphere to the light intensity reflected on the surface of the sample [ 85 ] .…”

Section: Integrated Spectral Purity Filters On the Collectormentioning

confidence: 99%

Spectral purity systems applied for laser-produced plasma extreme ultraviolet lithography sources: a review

Lin

Chen

Wei

et al. 2023

High Pow Laser Sci Eng

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With the development of high-volume manufacturing for very-large-scale integrated circuits, the purity of the light source in the extreme ultraviolet lithography (EUVL) system needs to fulfil extreme requirements in order to avoid thermal effect, optical distortion and critical dimension errors caused by out-of-band radiations. This paper reviews the key technologies and developments of the spectral purity systems for both a free-standing system and a built-in system integrated with the collector. The main challenges and developing trends are also discussed, with a view towards practical applications for further improvement. Designing and manufacturing spectral purity systems for EUVL is not a single task; rather, it requires systematic considerations for all relevant modules. Moreover, the requirement of spectral purity filters drives the innovation in filtering technologies, optical micromachining and advanced metrology.

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Section: Integrated Spectral Purity Filters On the Collectormentioning

confidence: 99%

Spectral purity systems applied for laser-produced plasma extreme ultraviolet lithography sources: a review

Lin

Chen

Wei

et al. 2023

High Pow Laser Sci Eng

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“…The system was developed at the Laser Research Center of Vilnius University (Lithuania) according to the recommendations of international ISO13696 standard. 9 The TIS apparatus has already been described in detail by L. Mažulė et al 10 The laser beam is focused with a 1-m-focal-length lens to a beam diameter from 0.1 to 0.4-mm on the investigated samples. The incidence angle of laser beam to the sample is 0 deg.…”

Section: Total Integrated Scattering Measurementsmentioning

confidence: 99%

Characterization of the optical components fabricated by femtosecond pulses in transparent materials

et al. 2013

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We report optical characterization of the different optical components fabricated in transparent materials by bulk refractive index modification or surface ablation by femtosecond pulses. The methods used for characterization of the components with refractive index modification fabricated in fused silica by high repetition rate femtosecond KGW:Yb laser were transmission and diffraction measurements at 532 and 632.8 nm wavelengths, and total integrated scattering (TIS) at 532 mn wavelength. The combined characterization methods were sufficient for modification process optimization and allowed creation of the Bragg gratings with diffraction efficiency in range from 55 to 90% and low scattering losses. The forward and backward TIS measurements of the radial polarization converter showed that forward scattering is more than five times as high as backward scattering. Solar cells with modified surface by femtosecond pulse ablation were investigated by TIS and Volt-Ampere measurements. The current increase is registered with growth of the scattering loses in the solar cells.

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“…Instantaneous unidimensional and areal measurements of the surface roughness can be performed with scattered light methods. For instance, total integrated scattering analyzes the relation of the incident beam intensity to the intensity of the scattered light [3]. However, it requires a complex measurement setup, which impedes the use in the production chain.…”

Section: Introductionmentioning

confidence: 99%

Roughness Measurements with Polychromatic Speckles on Tilted Surfaces

et al. 2021

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Surface light scattering enables contactless and fast measurements of surface roughness. A surface inclination alters the direction of the scattering beam and thus the measured surface roughness is calculated from the detected intensity distribution. Hence, an accurate sensor–surface alignment is necessary. In order to achieve tilt-independent roughness measurements, a model-based evaluation approach for polychromatic speckle patterns is presented. By evaluating the shape of the superposed speckles, which occur for polychromatic illumination, with regard to the distance to the scattering centre, surfaces with an Sa roughness value in the range of 0.8–3.2 μm are measurable. Experimental investigations demonstrate that the influence of a surface tilt up to ± 1.25° on the roughness measurement is reduced by 90%. As a result, the robustness of the polychromatic speckle roughness measurement is improved, which allows to speed up the adjustment of the measurement system or the surface sample, respectively.

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A system for measuring surface roughness by total integrated scattering

Cited by 18 publications

References 22 publications

Spectral purity systems applied for laser-produced plasma extreme ultraviolet lithography sources: a review

Spectral purity systems applied for laser-produced plasma extreme ultraviolet lithography sources: a review

Characterization of the optical components fabricated by femtosecond pulses in transparent materials

Roughness Measurements with Polychromatic Speckles on Tilted Surfaces

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