A super-high speed polishing technique for CVD diamond films

Subsurface cleavage of diamond after high-speed three-dimensional dynamic friction polishing

“…This phenomenon also may have been due to the multi-crystal orientations and unavoidable defects of polycrystal. In the previous reports [19][20][21], it was extremely difficult to obtain ultra-smooth surface of PCDs without pre-polishing, even with chemical assistance or superhigh-speed polishing employed. The scratched final polishing plate by a rough as-grown PCD without pre-polishing, fall-off of tiny crystal particles or the absence of multi-dimensional movement of a sample will result in low efficiency and insufficient repeatability for PCD ultra-smoothing.…”

“…Cathodoluminescence imaging was combined with high-resolution computed tomography (HR-CT) and high-resolution Raman spectroscopy to demonstrate the subsurface damage evolution and types. In addition, four possible origins of the Raman peaks for polished diamonds, e.g., a prominent peak located at 1425 cm -1 that was observed but neither mentioned and/or discussed in previous literature [17][18][19][20][21][24][25], were proposed.…”

“…Dynamic friction polishing (DFP) that integrates mechanical, thermal and chemical interactions has been developed in recent decades [17][18][19][20][21]. This procedure is based on the carbon dissolution in a metal wheel or can be considered as the catalytic action of such a wheel by high speed polishing, owing to the high temperature obtained by the workpiece during polishing [5,[17][18][19].…”

“…It utilizes the thermo-chemical reaction induced by the dynamic friction between a diamond and a metal disk, rotating to give a high linear peripheral velocity (15-25 m s -1 ) and with contact pressures of 3-7 MPa, to enable an efficient abrasive-free polishing of single and polycrystalline diamond [19]. This method has been shown to effectively reduce the surface roughness, with linear polishing speeds up to 60 m s -1 [5,[20][21]. More importantly, common wisdom is that soft surfaces exhibit high wear rates, whereas polishing hard surfaces leads to inferior faces [22][23].…”

Experimental Study on Fabrication of CVD Diamond Micro Milling Tool by Picosecond Pulsed Laser

“…Because of its excellent properties [ 2 , 3 ], CVD-D is a promising material for numerous mechanical, thermal, optical, electrical, and electronic applications. It has been widely used in modern industrial products such as cutting tools, semiconductors, optical windows [ 4 , 5 , 6 ], heat spreaders, X-ray lithography, and active electronic device elements [ 1 ]. Micro manufacturing is an important part of ultra-precision machining.…”