A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With CMOS Readout Circuit

Zhao, Yang; Zhao, Jian; Wang, Xi; Hu, Anqi; Shi, Qin; Qiu, Anping; Xu, Yong

doi:10.1109/jssc.2018.2844285

Cited by 51 publications

(34 citation statements)

References 26 publications

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“…A power-off experiment was performed to calculate the exact Q x . The specific experimental method was described in References [21,22]. Figure 5 shows the output of the drive mode over time after power-off.…”

Section: The Start-up Oscillation Process Of Mems Gyroscopesmentioning

confidence: 99%

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

Han

et al. 2020

Micromachines

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With the miniaturization of micro-electro-mechanical system (MEMS) gyroscopes, it is necessary to study their nonlinearity. The phase-frequency characteristics, which affect the start-up time, are crucial for guaranteeing the gyroscopes’ applicability. Nevertheless, although the amplitude-frequency (A-f) effect, one of the most obvious problems in nonlinearity, has been well studied, the phase response of nonlinear gyroscopes is rarely mentioned. In this work, an elaborate study on the characteristics and locking process of nonlinear MEMS gyroscopes is reported. We solved the dynamic equation using the harmonic balance method and simulated the phase-locked loop (PLL) actuation process with an iterative calculation method. It was shown that there existed an apparent overhanging and multi-valued phenomenon in both the amplitude–frequency and phase–frequency curves of nonlinear gyroscopes. Meanwhile, it was ascertained by our simulations that the locking time of PLL was retarded by the nonlinearity under certain conditions. Moreover, experiments demonstrating the effect of nonlinearity were aggravated by the high quality factor of the drive mode due to the instability of the vibration amplitude. A nonlinear PLL (NPLL) containing an integrator was designed to accelerate the locking process. The results show that the start-up time was reduced by an order of magnitude when the appropriate integral coefficient was used.

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Section: The Start-up Oscillation Process Of Mems Gyroscopesmentioning

confidence: 99%

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

Han

et al. 2020

Micromachines

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“…As explained in [27], the stability, gain-bandwidth product (GBP) and noise floor of TIA highly depend on its input loading capacitance, the 1/f noise of V b must be compromised and became the dominant contributor of bias-instability other than AGC. Figure 3b presents an alternative solution: a R-C passive filter is inserted between sense electrode and front-end TIA, which allows the motional current flow through C b and apply DC bias via R b [29,30]. In this case, the polarization voltage across the sense comb is free from the 1/f noise in TIA, but the cut-off frequency of this R-C network shall be low enough and hard to be integrated on-chip (i.e., C b > 1nF, R b > 10MΩ).…”

Section: Why Ac Polarization?mentioning

confidence: 99%

Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation

Zhao

Shi

et al. 2020

Sensors

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This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifier (TIA). In contrast to the conventional DC (direct current) scheme, AC polarization breaks the trade-off between input transistor gate size and white noise floor of TIA, a relative low input loading capacitance can be implemented for low noise consideration. Besides, a self-compensation technique combining polarization source and reference in automatic-gain-control (AGC) is put forward. It cancels the 1/f noise and drift introduced by the polarization source itself, which applies to both DC and AC polarization cases. The experimental result indicates the proposed AC polarization and self-compensation strategy expand the bias-instability of studied SOA from 2.58 μg to 0.51 μg with a full scale of ± 30 g, a 155.6 dB dynamic range is realized in this work.

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“…Limited by the manufacturing imperfections and immature packaging techniques, in-phase and quadrature error, caused by damping and stiffness coupling, are inevitable for vibratory gyroscopes [10]. Theoretically, the desired angular rate and unwanted quadrature error signals are orthogonal and could be separated via a phase-sensitive demodulation method because they are respectively modulated by the drive velocity and displacement [11]. However, the gyroscope can not work in the resonant state when circuit phase delay (generated by ADC, DAC, C/V, and etc.)…”

Section: Introductionmentioning

confidence: 99%

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

Xu¹,

Wei²,

Guo³

et al. 2021

Preprint

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With the development of designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system becomes a key point to determine their internal performances. Nevertheless, phase delay of electron components may result in some serious hazards. This paper describes a real-time circuit phase delay correction system for MEMS vibratory gyroscopes. A detailed theoretical analysis is provided to clarify the influences of circuit phase delay on the in-phase and quadrature (IQ) coupling characteristics and zero rate output (ZRO) utilizing force-to-rebalance (FTR) closed-loop detection and quadrature correction system. By deducing the relationship between amplitude-frequency, phase-frequency of MEMS gyroscope and the phase relationship of the whole control loop, a real-time correction system is proposed to automatically adjust the phase reference value of phase-locked loop (PLL) and thus compensate for the real-time circuit phase delay. The experimental results show that the correction system can accurately measure and compensate the circuit phase delay in real time. Furthermore, the unwanted IQ coupling can be eliminated and the ZRO is decreased by 755% to 0.095°/s. This correction system realizes a small angle random walk of 0.978°/√h, and a low bias instability of 9.458°/h together with a scale factor nonlinearity of 255 ppm at room temperature. Besides, the thermal drift of ZRO is reduced to 0.0034°/s/°C at a temperature range from -20°C to 70°C.

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A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With CMOS Readout Circuit

Cited by 51 publications

References 26 publications

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

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