Background: The aim of this study was to evaluate the mechanical behavior of M-wire, controlled memory (CM), and R-phase files under bending and torsion conditions and compare it to the mechanical response of NiTi file with the same geometry using finite element analysis. Methods: A geometric model of HyFlex file size 25 and taper 0.06 was generated by micro-computed tomographic and stereomicroscope scanning. The file FE model was built using MATLAB and SolidWorks software. Four FE files models were constructed with different material properties, the data for the M-wire, CM, R-phase, and NiTi alloys were obtained from the literature. The mechanical behavior of the different models under bending and torsion was analyzed mathematically in SolidWorks software package. Results: Under bending conditions, the maximum Von Misses stress value was related to NiTi file model (330 MPa), followed by M-wire (311 MPa), then CM file model (191 MPa), while the least amount of stress value was related to R-phase file model (169 MPa). When torsion test was performed the maximum stress value was also related to NiTi file model (270 MPa), followed by M-wire (261 MPa), then CM file model (191 MPa), while the least amount of stress value was related to R-phase file model (188 MPa). Conclusions: Metallurgical improvement of rotary files resulted in increasing the flexibility and the torsional resistance of these files.