2009
DOI: 10.1007/s10853-009-3529-1
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A single phase semiconducting Ca-silicide film growth by sputtering conditions, annealing temperature and annealing time

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Cited by 7 publications
(1 citation statement)
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“…Even though it is difficult to grow a single phase of the AEM-Si system, new techniques for the growth are successfully developing, which draws closer the possibility of using the materials in electronics. For example, Yinye et al reported a new method of growing semiconducting Ca 2 Si films [15]. With the new method they were able to avoid simultaneous growth of Ca 2 Si and CaSi, which is a more stable phase among the two.…”
Section: Introductionmentioning
confidence: 99%
“…Even though it is difficult to grow a single phase of the AEM-Si system, new techniques for the growth are successfully developing, which draws closer the possibility of using the materials in electronics. For example, Yinye et al reported a new method of growing semiconducting Ca 2 Si films [15]. With the new method they were able to avoid simultaneous growth of Ca 2 Si and CaSi, which is a more stable phase among the two.…”
Section: Introductionmentioning
confidence: 99%