“…In general, an ideal piezo motor for a high performance SPM should meet the following conditions: simple structure (high reliability), low‐voltage to control (i.e., low threshold voltage, which brings low noise and high precision), compact (low thermal drift and extreme condition compatible), and rigid (vibration resistant). However, most piezo motor types have nonnegligible disadvantages: Inchworm (Berndt et al ., ; Shimizu et al ., ; Kato et al ., ; Cusin et al ., ) is complicated and requires high machine tolerance; The Pan style (Pan et al ., ) motor is somewhat complicated with lower blocking force (thus lower output force) since it relies on shear displacement; the inertial motor (Pohl, ; Judy et al ., ; Howald et al ., ; Zesch et al ., ) is less rigid and produces small output force because the inertial force used is typically weak.…”