A Robustness Approach for Handling Modeling Errors in Parallel-Plate Electrostatic MEMS Control

Zhu, Guchuan; Saydy, Lahcen; Hosseini, M.; Chianetta, J.-F.; Peter, Yves-Alain

doi:10.1109/jmems.2008.2005291

Cited by 15 publications

(1 citation statement)

References 25 publications

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“…Previous researchers developed several linear and nonlinear controllers for microelectromechanical systems (MEMS) (Shang, 2017;Shirazi et al, 2011;Vagia et al, 2006Vagia et al, , 2008. By taking into account the finding field and deformation effect, Zhu et al (2008) developed a backstepping controller one-degree-of-freedom (1-DOF) parallel plate MEMS. For the micro-actuator, Tzes et al (2005) developed a multi-parametric H ∞ controller.…”

Section: Introductionmentioning

confidence: 99%

An improved fuzzy controller on electromechanical nano-tweezers

Koochi

Goharimanesh

Gharib

2022

Journal of Vibration and Control

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This paper aims to develop an improved fuzzy controller for position controlling of nano-wire-based electromechanical nano-tweezers. The nonlinear governing equation is developed by incorporating the Euler–Bernoulli beam model and Hamilton’s principle. Also, the quantum vacuum fluctuations are assimilated in the developed model in terms of Casimir attraction. The nonlinear constitutive equation is transformed into a nonlinear state-space form by employing the Galerkin method. Based on the linguistic explanation of the system, an improved fuzzy controller is designed to control the nano-tweezers for manipulating desired objects. The Taguchi technique has been used to decrease the number of independent experiments and improve the structure of membership functions, consequently. The designed controller is employed for both controlling and path tracking of nano-tweezers. The outcomes indicate that the proposed improved fuzzy controller has excellent performance for stabilizing the nano-tweezers at any desired gap.

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