2021
DOI: 10.1007/s00419-021-02002-3
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Design of a robust control scheme for path tracking and beyond pull-in stabilization of micro/nano-positioners in the presence of Casimir force and external disturbances

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Cited by 6 publications
(1 citation statement)
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“…Gharib et al (2021) investigated the capability of PID controller for path tracking of micro-positioner. Although the basic lumped parameter model may be used to describe physical events in NEMS/MEMS, it cannot be used to simulate their behavior correctly (Kolahi et al, 2021; Salarieh and Karami, 2014). Consideration of electrode deformation can increase the accuracy of the generated model and, as a result, the controller’s performance.…”
Section: Introductionmentioning
confidence: 99%
“…Gharib et al (2021) investigated the capability of PID controller for path tracking of micro-positioner. Although the basic lumped parameter model may be used to describe physical events in NEMS/MEMS, it cannot be used to simulate their behavior correctly (Kolahi et al, 2021; Salarieh and Karami, 2014). Consideration of electrode deformation can increase the accuracy of the generated model and, as a result, the controller’s performance.…”
Section: Introductionmentioning
confidence: 99%