A piezoelectric hydraulic linear motor with velocity self-monitoring

Qian, Chaoping; Chen, Song; Wang, Jiantao; Kan, Junwu; Zhang, Zhonghua; Yu, Mai

doi:10.1016/j.sna.2020.111962

Cited by 10 publications

(4 citation statements)

References 17 publications

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“…As a result of the development of piezoelectric precision positioning technology, piezoelectric actuators (Chorsi et al, 2019; Li et al, 2019; Mohith et al, 2021a; Pan et al, 2017; Peng et al, 2019) have been created to achieve precise resolution, large stroke motion, and outstanding output performance, and they may find use in a variety of industries, including biomedicine (Anis et al, 2011; Cheng et al, 2017), micro/nano manipulation (Gao et al, 2022; Liaw et al, 2008), precision machinery (He et al, 2019; Zhang et al, 2023), and others. Piezoelectric actuators are categorized into amplified types (Mohith et al, 2021b; Muralidhara and Rao, 2015), stepper types (Hu et al, 2021; Pan et al, 2022), traveling wave types (Liu et al, 2012, 2019), and piezo-hydraulic types (Kan et al, 2011; Qian et al, 2020), based on the driving principle. Piezo-hydraulic actuators combine the advantages of piezoelectric actuators and hydraulic transmission, providing enhanced positioning accuracy, a broader range of application scenarios, and a higher degree of automation.…”

Section: Introductionmentioning

confidence: 99%

Design of a piezoelectric pneumatic linear actuator in cell manipulation

Chen,

Huang,

Cheng

et al. 2024

Journal of Intelligent Material Systems and Structures

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A pneumatic piezoelectric linear actuator (PPLA) is proposed, which possesses the advantages of low power consumption, environmental friendliness, and high linearity of positioning. The prototype of the PPLA consists of a piezoelectric gas pump with serial chambers and a cylinder. The piezoelectric gas pump with serial chambers is designed with a wedge valve and flexible support structure, which results in high output performance and meets the working requirements of pneumatic linear actuators. Prototypes of PPLA are designed and manufactured. Experiments are conducted to investigate the effect of chamber height, driving voltage, and driving frequency on the performance of the PPLA. The experimental results indicate that increasing the chamber height enhances the output performance of the PPLA. At 250 Vpp and 120 Hz, the PPLA achieves a maximum output velocity of 16.62 mm/min and is able to handle a maximum load of 11 N. Additionally, an injection simulation experiment using zebrafish embryos is conducted, which confirms the high control accuracy and linearity of the PPLA. The experiment demonstrates the potential application of the PPLA in the field of cell manipulation.

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Section: Introductionmentioning

confidence: 99%

Design of a piezoelectric pneumatic linear actuator in cell manipulation

Chen,

Huang,

Cheng

et al. 2024

Journal of Intelligent Material Systems and Structures

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“…Among them, microfluidic actuators driven by piezoelectric materials have attracted widespread attention at home and abroad. In recent years, studies on piezoelectric fluid actuators, such as piezoelectric hydraulic motor (Denkena et al, 2017; Qian et al, 2020), piezoelectric injection valve (Gu et al, 2015; Lu et al, 2016; Zhou et al, 2017), piezoelectric pump (Li et al, 2021; Zhao and Ji, 2019; Dau and Dinh, 2015; Wada et al, 2014; Zhang et al, 2017), and piezoelectric mixer (Nam and Lim, 2018; Wang et al, 2018) etc., are continuously surging. Piezoelectric pumps use the tiny vibration of the piezoelectric actuator to directly or indirectly drive the fluid, which can realize the accurate delivery and control of the fluid.…”

Section: Introductionmentioning

confidence: 99%

Design and investigation on an ultrasonic-excited piezoelectric gas jet pump

Wang

Dong

Gao

et al. 2022

Journal of Intelligent Material Systems and Structures

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To improve the gas driving performance of the piezoelectric gas driver, this paper proposes a piezoelectric gas jet pump that uses the ultrasonic near sound field of the piezoelectric transducer to excite the gas mass points to oscillate and form a gas jet. The working characteristics of the pump are studied theoretically and experimentally. The distribution law of the sound field excited by the transducer in the sixth-order vibration mode is obtained through simulation analysis. Then the prototypes are designed through calculating the Reynolds number and Stokes number of the gas jet excited by ultrasonic near sound field. And the calculation results show that there is a direct relationship between the gas driving ability of the jet pump and the radiated sound pressure of the transducer. On this basis, the experiments are conducted and the results show that the gas driving performance is significantly affected by the position of the jet hole. When the jet hole is arranged in the central area of the piezoelectric transducer, the gas driving performance of the jet pump is the best. When the driving voltage is 80 Vpp and the driving frequency is 20.4 kHz, the gas flow rate reaches 0.39 L/min.

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“…In general, valve-less piezoelectric pumps [22][23][24] and piezoelectric pumps with passive valves [25][26][27] have large flow rate and high output pressure. However, because of their structural characteristics, they can only pump fluid in one direction with low flow control accuracy.…”

Section: Introductionmentioning

confidence: 99%

A multi-chamber piezoelectric pump based on pumping unit with double circular piezoelectric unimorph actuators

Wang¹,

Peng²,

Tang³

et al. 2021

Smart Mater. Struct.

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For improving flow rate of multi-chamber piezoelectric pump with active valves, principle and structure of multi-chamber piezoelectric pump based on pumping unit with double circular piezoelectric unimorph actuators (CPUAs) are proposed. Double CPUAs are coaxially and symmetrically arranged on top and bottom of pump chamber and work in same frequency and phase at same time to provide driving force for pump. Two active piezoelectric valves with annular boundary are designed on left and right of pumping unit to ensure the multi-chamber piezoelectric pump bidirectionally pump fluid with high control accuracy and stop characteristics. Process compatible with printed circuit board (PCB) process is used to manufacture pump to ensure low cost. Flow rate model is established to numerically simulate flow characteristics of the pump. Pump is also experimentally tested and analyzed. Results show that proposed principle and structure can effectively improve flow rate and out pressure of multi-chamber piezoelectric pump with high control accuracy and stop characteristics of flow. Moreover, flow rate model can accurately describe its flow characteristics, which will be beneficial to design and optimize multi-chamber piezoelectric pumps with active valves. Proposed principle and structure of multi-chamber piezoelectric pumps with active valves have potential applications in complex microfluidic systems such as biochemical analysis, drug delivery and chip cooling.

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A piezoelectric hydraulic linear motor with velocity self-monitoring

Cited by 10 publications

References 17 publications

Design of a piezoelectric pneumatic linear actuator in cell manipulation

Design of a piezoelectric pneumatic linear actuator in cell manipulation

Design and investigation on an ultrasonic-excited piezoelectric gas jet pump

A multi-chamber piezoelectric pump based on pumping unit with double circular piezoelectric unimorph actuators

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