A multi-chamber piezoelectric pump based on pumping unit with double circular piezoelectric unimorph actuators

Wang, Dai-Hua; Peng, Yun-Hao; Tang, Lian-Kai; Yu, Huaiqiang

doi:10.1088/1361-665x/ac182d

Cited by 9 publications

(8 citation statements)

References 36 publications

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“…This article calculates and analyzes the vibration displacement generated by electrical signal excitation based on the d-type piezoelectric ceramic driving equation. The d-type piezoelectric equation is shown in Equations ( 1) and (2), where D is the potential shift and T is the stress:…”

Section: Piezoelectric Driving Principle and Parametersmentioning

confidence: 99%

“…With the innovation and continuous development of the technological revolution, the research on drive and fluid control is gradually moving towards micro nano, and high-precision nano drive has made important application contributions in the direction of biomedicine and microelectronics. With the increasing demand for miniaturization and integration of electronic products [1], medical instruments [2], the speed and agility of biomedical testing, and the technological development of intelligent and high-precision medical equipment. The development of miniaturization technology requires that highprecision manipulation of microfluidics has been widely applied in biomedical fields [3][4][5], cell manipulation [6], micro nano diagnostics, high-precision operations, and other fields.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

High Precision Piezoelectric Micro Droplet Control and Generation System

Zhao,

Li,

Dong

et al. 2023

J. Phys.: Conf. Ser.

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To analyze and design an intelligent system that can achieve the generation and control of micro droplets. This article is based on the ANSYS finite element analysis and calculation software to design a fluid piezoelectric actuator with a circular oscillator, establish an overall structural model, and provide the design principle and driving structure of the piezoelectric actuator. And different control methods and driving performance were explored. We studied the simulation method of calculating the pressure at the nozzle through the variation of signal excitation amplitude and the control basis of micro droplets. Through the excitation signal, the movement of the fluid can be controlled, and the driving control effect of the fluid has been verified through simulation calculations.

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Section: Piezoelectric Driving Principle and Parametersmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

High Precision Piezoelectric Micro Droplet Control and Generation System

Zhao,

Li,

Dong

et al. 2023

J. Phys.: Conf. Ser.

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show abstract

“…The total channel length of the inlet to outlet is 60 mm. Wang et al proposed a multi-chamber piezoelectric pump based on a pumping unit with double circular piezoelectric actuators to improve the flow rate [26]. Singh et al modified the conventional circular pump chamber and added a taper angle geometry at the outlet, which increased the flow rate by 28% [23].…”

Section: Introductionmentioning

confidence: 99%

Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function

Shen¹,

Guo²,

Ran³

et al. 2022

J. Micromech. Microeng.

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The piezoelectric valveless micropump with the characteristics of precise liquid delivery is widely utilized in the field of biomedicine. However, the improvement of the flow rate of the piezoelectric micropump relies on the increase in size and driving voltage, which hinders its application in the implantable medical field. This article proposes a double-layer chamber valveless piezoelectric micropump, which has the obvious advantages of small size and adjustable flow rate, and is expected to be applied to the treatment of implantable hydrocephalus. The overall size of the micropump is 10 mm × 10 mm × 4 mm, which can be implanted in the cerebral cortex. Combined with polydimethylsiloxane-polyethylene glycol terephthalate bonding technology, the double-layer chamber micropump solves the contradiction between miniaturization and large flow range. The flow rate generated by micropump under low voltage can be adjusted according to the amount of hydrocephalus. In order to reveal the mechanism of increasing the flow rate, the working efficiencies of the microvalve and micropump are studied in this article. The electric-solid-fluid coupling simulation and experimental tests obtained the optimal structural parameters: the divergence angle is 30°, the throat width is 300 μm, and the upper chamber depth is 100 μm. The proposed micropump can achieve the tunable flow rate of 2.16-51.74 μl min-1.

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“…Our research team proposed a piezoelectric micropump integrated into PCB [33] base on piezoelectric unimorph actuators (CPUAs) [34] and active piezoelectric valve with annular boundary [35], this pump had the maximum flow rate of 500 µL min −1 and the maximum back pressure of 760 Pa. Meanwhile, we proposed a piezoelectric micropump based on pumping unit with double CPUAs with the maximum flow rate of 835 µL min −1 and the maximum back pressure of 1600 Pa [36].…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, combined with the previous research [33][34][35][36], the principle and structure of a multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array are proposed and realized. The machining of silicon-based pump body is realized through photoetching technology on silicon substrate and the micropump is fabricated by fixing CPUAs on the silicon-based pump body.…”

Section: Introductionmentioning

confidence: 99%

A novel multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array

Peng¹,

Wang²

2022

Smart Mater. Struct.

Self Cite

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In order to only use one piezoelectric micropump to simultaneously drive and control multi-channel flow fluids of complex microfluidic systems in biological, chemical and medical applications, and then improve the integration and reduce the size of systems, principle and structure of a multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array are proposed and realized. The micropump is composed of one pumping unit and four active piezoelectric valves with annular boundaries, which form active piezoelectric valve array by uniformly distributing around pumping unit. All valves are connected to pumping unit by corresponding fluid channels and they can realize bidirectional fluid flowing. Therefore, pump can suck fluid from any one or more valves through pumping unit and can discharge fluid to the other one or more valves, which form its six working modes. Silicon-based pump body is processed by photoetching and the micropump is fabricated by fixing circular piezoelectric unimorph actuators on the silicon-based pump body. Flow rate model is established, the flow characteristics under each working mode are experimentally tested. Results show that the micropump can realize simultaneously multi-channel fluid input and output, when it works under three-in and single-out, it has the maximum flow rate and output pressure; the flow rate model can predict its flow rate, the maximum relative error between experimental test result and numerical simulation result is 9.99%; the micropump has high flow control accuracy, when amplitude of driving voltage varies from 35 V to 36 V with step of 0.1 V, it has the minimum change of flow rate of 1 μL/min, the maximum flow rate deviation of 5 μL/min and the maximum relative standard deviation of flow rate control of 0.175%. Therefore, the micropump provide feasible scheme for piezoelectric micropumps to be applied in complex microfluidic systems with multi-channel flow fluids, such as lab-on-chip.

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A multi-chamber piezoelectric pump based on pumping unit with double circular piezoelectric unimorph actuators

Cited by 9 publications

References 36 publications

High Precision Piezoelectric Micro Droplet Control and Generation System

High Precision Piezoelectric Micro Droplet Control and Generation System

Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function

A novel multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array

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