A one-dimensional ion beam figuring system for x-ray mirror fabrication

Idir, Mourad; Huang, Lei; Bouet, Nathalie; Kaznatcheev, Konstantine; Vescovi, Matthew; Lauer, Ken; Conley, Ray; Rennie, Kent; Kahn, J. R.; Nethery, Richard; Zhou, Lin

doi:10.1063/1.4934806

Cited by 20 publications

(7 citation statements)

References 13 publications

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“…Высококачественная оптическая поверхность и хорошие характеристики изгиба необходимы для обеспечения точной фокусировки рентгеновского пучка. Высококачественная оптическая поверхность может быть получена с помощью методов полировки, таких как полировка ионным пучком [7] и упруго-эмиссионная обработка (EEM) [8]. Необходимые хорошие характеристики изгиба может обеспечить активная и адаптивная оптика.…”

Section: исполнительные механизмыunclassified

Адаптивная И Активная Рентгеновская Оптика

Лидер

2022

Оптика И Спектроскопия

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Описаны принципы работы и возможности рентгеновской адаптивной и активной оптики. Рассмотрены основные исполнительные механизмы изгиба зеркал полного внешнего отражения, используемых на источниках синхротронного излучения и в рентгеновских телескопах. Особое внимание уделено метрологии волнового фронта с использованием датчиков Шака-Гартмана, а также датчиков на основе решетчатых интерферометров, рентгеновских спеклов и птихографии. Ключевые слова: рентгеновские лучи, адаптивная оптика, активная оптика, биморфное зеркало, волновой фронт, метрология.

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Section: исполнительные механизмыunclassified

Адаптивная И Активная Рентгеновская Оптика

Лидер

2022

Оптика И Спектроскопия

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“…The wavefront error resulting from imperfections of upstream optics on a beamline can introduce significant systematic error for measurements of super-polished X-ray mirrors with slope errors <100 nrad. For example, it is essential to consider the wavefront error contribution from upstream optics and provide precise metrology information for the ion beam figuring (IBF, a form of corrective polishing) process (Siewert et al, 2005;Idir et al, 2015;Hand et al, 2019).…”

Section: Introductionmentioning

confidence: 99%

Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics

Hu¹,

Wang²,

Fox³

et al. 2022

J Synchrotron Radiat

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Speckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1D information typically output from speckled-based methods, a 2D map is more informative for understanding the overall quality of the optic being tested. In this paper, we propose a method for in situ 2D absolute metrology of weakly focusing X-ray mirrors. Importantly, the angular misalignment of the mirror can be easily corrected with the proposed 2D processing procedure. We hope the speckle pattern data processing method presented here will help to extend this technique to wider applications in the synchrotron radiation and X-ray free-electron laser communities.

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“…Figure correction is generally achieved by deterministic removal or addition methods to reduce the deviation between the fabricated figure and the designed one. The removal methods mainly include plasma chemical vaporization machining (PCVM) combined with elastic emission machining (EEM) [1][2][3], and ion beam figuring (IBF) [4][5][6]. PCVM combined with EEM can create mirror surfaces with a figure error (peak-to-valley (PV)) as low as 1 nm and a lateral resolution close to 0.1 mm [7].…”

Section: Introductionmentioning

confidence: 99%

Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control

Shi

Huang

et al. 2020

Coatings

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Differential deposition and profile coating are two common deterministic fabrication methods for figure correction of high-precision mirrors. The generation of the desired particle distribution on the substrate as the growing function is an important prerequisite, especially for two-dimensional correction. A model of particle distribution considering the etched ring shape, mask structure, and mask distance between the target and substrate is established. The model is verified by deposition experiments using a series of circular holes with different hole sizes and distances of the mask from the substrate. According to the model, a smallest deposition beam width of 2.79 mm can be obtained using a hole with a 3 mm diameter. The shape of the particle distribution gradually changes from convex to concave as the mask moves away from the substrate for different holes. A two-dimensional figure correction of a flat mirror was demonstrated using a hole with a 6 mm diameter. The peak-to-valley (PV) value is reduced from 74.23 nm to 10.09 nm, and the root mean square (RMS) value is reduced from 18.38 nm to 1.36 nm within a 130 mm × 20 mm area. The model could provide useful guidance for high-precision two-dimensional figure correction applications.

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A one-dimensional ion beam figuring system for x-ray mirror fabrication

Cited by 20 publications

References 13 publications

Адаптивная И Активная Рентгеновская Оптика

Адаптивная И Активная Рентгеновская Оптика

Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics

Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control

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