A novel uncooled substrate-free optical-readable infrared detector: design, fabrication and performance

Li, Chaobo; Jiao, Binbin; Shi, Shali; Chen, Dapeng; Ye, Tianchun; Zhang, Qingchuan; Dong, Fengzhong; Miao, Zhengyu

doi:10.1088/0957-0233/17/7/042

Cited by 29 publications

(25 citation statements)

References 7 publications

(8 reference statements)

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“…Experimental data indicate that the read-out sensitivity of read-out section is about 1.38×10 4 grey/deg, which matches well with modeling (1.72×10 4 grey/deg). The tiny difference between experimental result and modeling result is caused by the deformation of micro-mirror, which reduces the sensitivity of the system [12].…”

Section: Experiments and Results Discussionmentioning

confidence: 99%

“…Figure 2 shows the top view of the pixel of BMCA. The reflector (micro-mirror) is supported by two SiNx legs which are selected coating by gold film [12]. When the incident IR flux is absorbed by a pixel in the BMCA, the pixel's temperature rises, and then causes a small inclination angle θ of the micro-mirror because of the mismatch of thermal expansion coefficients between the two materials [12], which is shown in Fig.…”

Section: Bmcamentioning

confidence: 99%

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An Optical Readout Method Based Uncooled Infrared Imaging System

Jiao

Chen

et al. 2008

Int J Infrared Milli Waves

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This paper presents an optical readout method based uncooled infrared imaging system that contains an optical read-out section and a bi-material micro-cantilever arrays (BMCA) detector. The optical read-out section is based on incoherent light spatial filter technique. The read-out section converts the deflection angles of BMCA caused by absorption of infrared (IR) radiation to a visible image through optical filtering operation of the BMCA with a knife-edge filter. A spatial mathematical model is presented to describe the read-out method and its validity is proved. The IR image of a person's hand obtained through the using of the 100×100 BMCA and the 12-bit A/D quantizer demonstrates the ability of the system to create image. The performance test shows that the average Noiseequivalent temperature difference (NETD) of the imaging system can arrive at about 183 mK with some areas having a NETD as low as 78 mK.

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Section: Experiments and Results Discussionmentioning

confidence: 99%

Section: Bmcamentioning

confidence: 99%

An Optical Readout Method Based Uncooled Infrared Imaging System

Jiao

Chen

et al. 2008

Int J Infrared Milli Waves

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“…Within the 10 years of academic activities more than 30 articles have been published. The focus has been aimed on a sub− strate−free FPA, which has been introduced in 2006 [108]. The pixel design is highly sophisticated: it is squared with four legs on each pixel side, of which two legs were thermal isolators and two legs interlaced acted as bi−material actua− tors.…”

Section: Developments In Chinamentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

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We present a state-of-the-art overview of microthermomechanical infrared sensor technology. The working principle of this sensor is based on a bi-material actuated micromechanical deflection, generated by an induced temperature rise due to incident infrared radiation absorption. In order to generate a thermal image the thermomechanical deflections of the freestanding microstructures are read by either capacitive, piezoresistive or optical means. Research and development activities in this field began in the early 1990s. The development of this technology within the last 20 years has resulted in innovations such as uncooled multiband infrared detection, high-speed infrared sensing and uncooled THz imaging. This paper outlines representative milestones of this technology and analyses important results of notable groups. Significant activities on capacitive and optical readout techniques of thermomechanical infrared arrays are presented. Furthermore the advantages of microthermomechanical infrared sensors over current well-established uncooled infrared technologies are summarized. In conclusion the latest developments of this technology offer a highly potential solution for a variety of important energy-saving, safety and security applications.

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“…The relationship between response time and air pressure, however, has not been mentioned yet. In this letter, after the successful fabrication of a substrate-free MEMS FPA [7], [8], the influence of air pressure on the FPA's performance was experimentally investigated, and a vacuum packaging technique was also developed.…”

Section: Introductionmentioning

confidence: 99%

Investigation on Performance and Vacuum Package of MEMS Infrared Focal Plane Arrays

Ou¹,

Li²,

Qu³

et al. 2013

IEEE Electron Device Lett.

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A substrate-free microelectromechanical system (MEMS) focal plane array (FPA) has been successfully developed. Since there is no silicon substrate beneath the FPA's pixels, the infrared radiation (IR) loss has been significantly reduced. However, at ambient pressure, it is difficult to obtain a clear visible image due to the sensitivity loss caused by the thermal conductance of air. To improve the packaged FPA's performance, its thermal sensitivity and response time were investigated under varying air pressure. The high-contrast IR thermal images of a human hand were captured at room temperature and under an air pressure of 0.01 Pa, and the noise-equivalent temperature difference of the FPA was also estimated to be about 373 mK compared with the 1.4 K under a pressure of 10 Pa. What is important is that the FPA's response time was increased from 50.1 to 336.6 ms by the decrease in air pressure. In addition, we present an approach to package the MEMS FPA at a low-pressure vacuum with two optical windows, which is an effective way to increase FPA's sensitivity.Index Terms-Focal plane array (FPA), microelectromechanical systems (MEMSs), response time, thermal sensitivity, uncooled, vacuum package.

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A novel uncooled substrate-free optical-readable infrared detector: design, fabrication and performance

Cited by 29 publications

References 7 publications

An Optical Readout Method Based Uncooled Infrared Imaging System

An Optical Readout Method Based Uncooled Infrared Imaging System

Microthermomechanical infrared sensors

Investigation on Performance and Vacuum Package of MEMS Infrared Focal Plane Arrays

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