Abstract:This paper presents a micromachined claw probe with electroplating nickel for microsolder ball electrical testing applications. The suspension claw structure consists of two bridges and four curved cantilevers, which have a flexible spring constant in a small region. The out-of-plane claw-probe unit was fabricated using silicon bulk micromachining, titanium deposition, and nickel electroplating processes. The typical bending cantilever structure, made by nickel electroplating, had a thickness of 6.5 μm, a widt… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.