2021
DOI: 10.1109/jmems.2021.3112769
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A Monolithic Micromachined Thermocouple Probe With Electroplating Nickel for Micro-LED Inspection

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Cited by 5 publications
(3 citation statements)
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“…Although the authors contended that the surface of a 200 µm diameter thermocouple experiences minimal influence from incident or reflected light, they did not address the potential effects of light blocking on the LEDs themselves. Similarly, Shih et al [52] utilized micromechanical monolithic thermocouples with probe sizes of 78 µm and 118 µm to perform electrical and thermal measurements on micro LEDs. Mechanical tests confirmed that the probe tip could make accurate contact with the miniature LED electrodes with low contact force, thus effectively determining the thermal and electrical characteristics.…”
Section: Micro-thermocouple Methodsmentioning
confidence: 99%
“…Although the authors contended that the surface of a 200 µm diameter thermocouple experiences minimal influence from incident or reflected light, they did not address the potential effects of light blocking on the LEDs themselves. Similarly, Shih et al [52] utilized micromechanical monolithic thermocouples with probe sizes of 78 µm and 118 µm to perform electrical and thermal measurements on micro LEDs. Mechanical tests confirmed that the probe tip could make accurate contact with the miniature LED electrodes with low contact force, thus effectively determining the thermal and electrical characteristics.…”
Section: Micro-thermocouple Methodsmentioning
confidence: 99%
“…Shih et al [ 228 ] micromachined monolithic thermocouples with 78 and 118 μm probe sizes for electrical and thermal inspection of micro-LEDs. Mechanical tests verified that the probe tips could exactly contact the micro-LED electrodes with low contact forces, and, consequently, thermal and electrical properties were successfully determined.…”
Section: Other Approachesmentioning
confidence: 99%
“…Thermocouples are employed to determine the temperature at specific points, such as hot spots in boilers, ovens, furnaces, and other heat sources. At higher temperatures, thermocouples can only be used two or three times before they fail, necessitating periodic thermocouple replacement due to their breakage [7,8]. Hence, it is necessary to turn off the entire unit in order to replace a thermocouple within a furnace or boiler.…”
Section: Introductionmentioning
confidence: 99%