A novel microfabrication technology on organic substrates – application to a thermal flow sensor

Micromachined Thermal Flow Sensors—A Review

“…Even better thermal isolation can be obtained by creating a vacuum sealed cavity underneath the membrane while temperature is sensed above as used by Liu et al and Hsiai et al [53,54]. SU-8 can also be used for thermal isolation of Pt resistors due to its low thermal conductivity of 0.2 W/mK [55,56]. Figure 8.…”

Demonstration of a new technology which allows direct sensor integration on flexible substrates

“…Recently, a novel fabrication method which concerns the formation of thermal sensors on printed circuit boards was presented [2]. The method which is described in this paper extends the specific technology to the formation of micro-devices in flexible substrates.…”

“…The implementation of an alternative version of the presented technology [2] on rigid organic substrates has already produced a family of PCB-based sensors with extremely satisfying operational characteristics. All sensors employ the monitoring of heat transfer to the thermistors in order to measure quantities such as the gas flow rate, the liquid flow rate, vacuum, position and microchannel flow [3,4].…”

Novel mass air flow meter for automobile industry based on thermal flow microsensor. I. Analytical model and microsensor

“…In general, depending on the needs of the practice, thermal flow microsensors can be used to measure small gas flow rate from 0.01 ml/min [19] up to the values of a few l/min, as in [20][21][22]. The value of maximum gas flow rate to be measured can be significantly increased by registering a split flow, where the percentage of flow going over the sensor is known with respect to the total flow rate.…”