Micromachined Thermal Flow Sensors—A Review

Kuo, Jen-Tsai; Liu, Yu; Meng, Ellis

doi:10.3390/mi3030550

Cited by 397 publications

(243 citation statements)

References 87 publications

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“…Thanks to the technological developments in electronics and MEMS-based sensors [29][30][31][32], nowadays, most mobile devices (e.g., smartphones and tablets) are provided with several embedded sensors. Hence, differently from other works, which considered the use of external sensors (e.g., [8,9,17]), here, an indoor navigation system based on the use of the sensors embedded in standard mobile devices is considered.…”

Section: System Description and Relation To Previous Workmentioning

confidence: 99%

A Particle Filter for Smartphone-Based Indoor Pedestrian Navigation

et al. 2014

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This paper considers the problem of indoor navigation by means of low-cost mobile devices. The required accuracy, the low reliability of low-cost sensor measurements and the typical unavailability of the GPS signal make indoor navigation a challenging problem. In this paper, a particle filtering approach is presented in order to obtain good navigation performance in an indoor environment: the proposed method is based on the integration of information provided by the inertial navigation system measurements, the radio signal strength of a standard wireless network and of the geometrical information of the building. In order to make the system as simple as possible from the user's point of view, sensors are assumed to be uncalibrated at the beginning of the navigation, and an auto-calibration procedure of the magnetic sensor is performed to improve the system performance: the proposed calibration procedure is performed during regular user's motion (no specific work is required). The navigation accuracy achievable with the proposed method and the results of the auto-calibration procedure are evaluated by means of a set of tests carried out in a university building.

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Section: System Description and Relation To Previous Workmentioning

confidence: 99%

A Particle Filter for Smartphone-Based Indoor Pedestrian Navigation

et al. 2014

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“…The first approach is based on hot-film anemometry (Saremi et al, 2014;Kuo et al, 2012) where the convective cooling of a passing fluid changes the temperature of a heating film and, consequentially, its electrical resistance. This resistance change can be exploited to acquire information about the fluid velocity.…”

Section: Hot-film Approachmentioning

confidence: 99%

“…They are used to measure wind, wall shear stress, viscosity, monitor gas in gas chromatography, and fluid flow in flow cytometry (Kuo et al, 2012;Nguyen, 1997;Makinwa and Huijsing, 2001;Loefdahl and Gad-el Hak, 1999;Ju et al, 2011;Yu et al, 2008;Kaanta et al, 2009;Chua and Pak, 2015;Nguyen et al, 2014;Cubukcu et al, 2014;Reyes Romero et al, 2013). Flow sensors can be classified either as thermal or non-thermal.…”

Section: Introductionmentioning

confidence: 99%

Hot-film and calorimetric thermal air flow sensors realized with printed board technology

Glatzl

Ćerimović

Steiner

et al. 2016

J. Sens. Sens. Syst.

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Abstract. This paper addresses the development of flow sensors optimized for heating, ventilating, and air conditioning systems. The sensors are based on the printed circuit board technology facilitating robust, flexible (in terms of layout), and cost-effective devices. Two approaches for measuring fluid quantities like flow velocity over the whole cross section are investigated in this context. The first one relies on hot-film transduction and stands out for its simplicity, but also shows some severe limitations, which can be circumvented by the second approach based on calorimetric transduction. Supported by extensive numerical simulations, several sensor embodiments were investigated and fabricated. After experimental characterization, measurement and simulation results were compared, which turned out to be in good agreement.

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“…It includes the thin membrane for pressure measurement, the heater and thermister for thermal-related applications, and the free-standing structure with excellent thermal isolation for high temperature platforms. The microhotplate fabricated by microelectromechanical systems (MEMS) technology has been widely used for gas pressure sensors, gas sensors, chemical sensors, flow sensors, and accelerometers [8][9][10][11][12][13]. It could also be implemented in the standard CMOS process for high yield and low cost.…”

Section: Introductionmentioning

confidence: 99%

Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor

Wang¹,

Yu²

2015

Micromachines

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Abstract:A multifunctional platform based on the microhotplate was developed for applications including a Pirani vacuum gauge, temperature, and gas sensor. It consisted of a tungsten microhotplate and an on-chip operational amplifier. The platform was fabricated in a standard complementary metal oxide semiconductor (CMOS) process. A tungsten plug in standard CMOS process was specially designed as the serpentine resistor for the microhotplate, acting as both heater and thermister. With the sacrificial layer technology, the microhotplate was suspended over the silicon substrate with a 340 nm gap. The on-chip operational amplifier provided a bias current for the microhotplate. This platform has been used to develop different kinds of sensors. The first one was a Pirani vacuum gauge ranging from 10´1 to 10 5 Pa. The second one was a temperature sensor ranging from´20 to 70˝C. The third one was a thermal-conductivity gas sensor, which could distinguish gases with different thermal conductivities in constant gas pressure and environment temperature. In the fourth application, with extra fabrication processes including the deposition of gas-sensitive film, the platform was used as a metal-oxide gas sensor for the detection of gas concentration.

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Micromachined Thermal Flow Sensors—A Review

Cited by 397 publications

References 87 publications

A Particle Filter for Smartphone-Based Indoor Pedestrian Navigation

A Particle Filter for Smartphone-Based Indoor Pedestrian Navigation

Hot-film and calorimetric thermal air flow sensors realized with printed board technology

Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor

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