A novel electrostatic actuator for micro deformable mirrors: fabrication and test

Divoux, C.; Charton, J.; Schwartz, Wilfrid; Stadler, Eric; Margail, J.; Jocou, L.; Enot, T.; Barbé, J. C.; Chiaroni, Jacques; Berruyer, P.

doi:10.1109/sensor.2003.1215360

Cited by 16 publications

(8 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The zipping effect also improves the overall stability and pull-in voltage of the device. Results have shown that the curved electrode design will improve the actuator stroke by more than 2 times with respect to the similar classical parallel-plate design (8) .…”

Section: Principles Of Operationmentioning

confidence: 98%

2 Degree-of-Freedom Spiral Micromirror Manipulator Fabrication and Spatial Mechanical Assembling

Sadat

Kamiya

Bagheri

et al. 2008

JAMDSM

View full text Add to dashboard Cite

We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. The manipulator is comprised of two different parts, which are fabricated using conventional surface micromachining processes. The footprint of the assembled device is about 600µm and the height of the micro pyramid is 200µ m. In spite of conventional approaches to microsystem design, which prefer devices with monolithic and self-assembling properties, the two parts are fabricated on two different chips. They are then assembled using a spatial mechanical approach. A number of separate spiral and pyramid parts are fabricated and the first assembling test on a single actuator is performed. In this paper, the Surface micromachining processes used for fabrication of the parts are presented and their sensitivity and issues are discussed. Spatial mechanical assembly results are presented and process issues are addressed.

show abstract

Section: Principles Of Operationmentioning

confidence: 98%

2 Degree-of-Freedom Spiral Micromirror Manipulator Fabrication and Spatial Mechanical Assembling

Sadat

Kamiya

Bagheri

et al. 2008

JAMDSM

View full text Add to dashboard Cite

show abstract

“…For example, several groups have used curved surface electrode methods [11]- [13]. The principal idea is that when two electrodes are not parallel, electrostatic forces are much larger in the area where the gap is smallest.…”

Section: Icroelectromechanical Systems (Mems)mentioning

confidence: 99%

“…Furthermore, this curved shape electrode actuator inherently utilizes the zipping effect [13] to lower the curved-to-flat pull-in voltage, thus overcoming the traditional limitation of not being able to have both large displacement and high force at the same time for electrostatic actuators with a reasonably low operation voltage.…”

Section: Actuation Of Shaped Micromirrorsmentioning

confidence: 99%

Static and electrically actuated shaped MEMS mirrors

Smith

Kahn

et al. 2005

J. Microelectromech. Syst.

View full text Add to dashboard Cite

A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 m, static radius of curvature = 6 4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.[1211]Index Terms-Curvature modulation, microelectromechanical systems (MEMS), micromirror, multilayer, optical switch.

show abstract

“…In other words, the physical shape of the flexure part determines the force displacement, dynamic response, and stability characteristics of the device. In electrostatic comb drives [11], the actuation and flexure portions of the device are separated, while in so-called zipping actuators [13], [14], electrostatic and flexure counterparts are fused into each other. This means that the electrostatic actuator acts to deform the flexure that will, in return, react to change the charge distribution on the capacitor plates/flexures (Fig.…”

Section: Introductionmentioning

confidence: 99%

Large-Deflection Spiral-Shaped Micromirror Actuator

Sadat

Kamiya

Horie

2009

J. Microelectromech. Syst.

View full text Add to dashboard Cite

We present a new two-axis spiral-shaped micromirror manipulator developed for free-space optical switching. The actuator is an electrostatic actuator, which is composed of two different parts that are fabricated using conventional surfacemicromachining processes and are then assembled. Instead of conventional monolithic self-assembling design approaches, these two parts are fabricated on two different chips and assembled using a spatial-mechanical approach. The design utilizes the increased flexibility of the spiral-shaped electrode and the zipping-effect technique in order to increase the maximum rotation angle. The footprint of the assembled device is 600 μm × 600 μm, and the height of the micropyramid is 200 μm. The switch is simulated using an energy method and a coupled electromechanical model. Its performance is measured statically using a reflection measurement approach. A continuous rotational actuation of 17 • has been achieved with an actuation voltage of 235 V.[ 2008-0319]Index Terms-Actuator, electrode shape, microelectromechanical systems (MEMS), micromirror, optical switch.

show abstract

A novel electrostatic actuator for micro deformable mirrors: fabrication and test

Cited by 16 publications

References 3 publications

2 Degree-of-Freedom Spiral Micromirror Manipulator Fabrication and Spatial Mechanical Assembling

2 Degree-of-Freedom Spiral Micromirror Manipulator Fabrication and Spatial Mechanical Assembling

Static and electrically actuated shaped MEMS mirrors

Large-Deflection Spiral-Shaped Micromirror Actuator

Contact Info

Product

Resources

About