For conventional micromachines, in particular, micromotion convert mechanisms, the output points of the mechanism can move horizontally when input points move in the same direction. Therefore, we have proposed a threedimensional motion convert mechanism whose output points can move vertically when the input points move in the horizontal direction. This 2-degree-of-freedom (DOF) mechanism consists of electrostatic comb-drive actuators and a basic mechanism with large-deflective elastic hinges. In this study, the characteristics of comb-drive actuators are analyzed. The electrostatic comb-drive actuator which is made up of polyimide is fabricated by CVD, RIE, Wet etching, etc., technologies. The relationship between the input (voltage) and the output (displacement) of the drive has been analyzed both theoretically and experimentally.
We present a new two-axis spiral-shaped micromirror manipulator developed for free-space optical switching. The actuator is an electrostatic actuator, which is composed of two different parts that are fabricated using conventional surfacemicromachining processes and are then assembled. Instead of conventional monolithic self-assembling design approaches, these two parts are fabricated on two different chips and assembled using a spatial-mechanical approach. The design utilizes the increased flexibility of the spiral-shaped electrode and the zipping-effect technique in order to increase the maximum rotation angle. The footprint of the assembled device is 600 μm × 600 μm, and the height of the micropyramid is 200 μm. The switch is simulated using an energy method and a coupled electromechanical model. Its performance is measured statically using a reflection measurement approach. A continuous rotational actuation of 17 • has been achieved with an actuation voltage of 235 V.[
2008-0319]Index Terms-Actuator, electrode shape, microelectromechanical systems (MEMS), micromirror, optical switch.
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