A novel adaptive approach to modeling MEMS tunable capacitors using MRTD and FDTD techniques

Bushyager, N.; Tentzeris, Manos M.; Gatewood, L.; DeNatale, J.F.

doi:10.1109/mwsym.2001.967303

Cited by 5 publications

(6 citation statements)

References 4 publications

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“…Under the combined effect of the mechanical and electrical forces, the top plate moves until the equilibrium between the electrostatic and mechanical forces is reached. Kx denotes the spring force, bdx / dt denotes the damper force, and f ex denotes the electrostatic force, which are expressed in the following equation :

m \frac{d^{2} x}{d t^{2}} + b \frac{d x}{d t} + K x = f_{ex},

…”

Section: Computational Models and Methodsmentioning

confidence: 99%

FDTD Analysis of Emission from Capacitor with Mechanical Motion

Shimizu

Hirata

Kuroda

2013

Micro & Optical Tech Letters

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In this study, we investigate the unwanted emission from a simplified microelectro‐mechanical capacitor with sinusoidal and damped motions. A finite‐difference time‐domain method combined with an adaptive local subcell technique is developed to analyze the field emission from the variable capacitor. First, our computational method is confirmed from the time course of the charge accumulated on the electrode. The unwanted electromagnetic wave is observed to be radiated with its amplitude being sinusoidally modulated at the frequency of the electrode motion. For a realistic motion of the variable capacitor with a damped vibration, the unwanted emission is modulated at frequencies lower than the source frequency. © 2013 Wiley Periodicals, Inc. Microwave Opt Technol Lett 55:2821–2824, 2013

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m \frac{d^{2} x}{d t^{2}} + b \frac{d x}{d t} + K x = f_{ex},

…”

Section: Computational Models and Methodsmentioning

confidence: 99%

FDTD Analysis of Emission from Capacitor with Mechanical Motion

Shimizu

Hirata

Kuroda

2013

Micro & Optical Tech Letters

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“…Existing simulation methodologies include finite and boundary element analyses (FEA/BEA) for numerical, electrostatic and mechanical simulations. [4]- [5]. The commercially available tools used for MEMS design community include ANSYS, Comsol Multiphysics, Coventorware and ABAQUS.…”

Section: Introductionmentioning

confidence: 99%

A Comprehensive High-Level Model for CMOS-MEMS Resonators

2018

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This paper presents a behavioral modeling technique for CMOS-MEMS microresonators that enables simulation of a MEMS resonator model in Analog Hardware Description Language (AHDL) format within a system-level circuit simulation. A 100 kHz CMOS-MEMS resonant pressure sensor has been modeled into Verilog-A code and successfully simulated within Cadence framework. Analysis has shown that simulation results of the reported model are in agreement with the device characterization results. As an application of the proposed methodology, simulation and results of the model together with an integrated monolithic low-noise amplifier is exemplified for detecting the position change of the resonator.

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“…Over the last few years, extensive research work in modeling and simulation of MEMS took place, and a large number of techniques appeared in the literature to tackle this complicated modeling problem, each having its own advantages and limitations (Bushyager et al, 2003;Lynn Khine & Moorthi, 2006;Khine A. et. al., 2008;Yong Zhu & Espinosa, 2003;Shanmugavalli et.…”

Section: Introductionmentioning

confidence: 99%

“…al., 2008;Fengyan and Vaughn, 2009;Chiao & Liwei, 2000). Bushyager and his coworkers considered modeling electro-statically actuated RF passive components, such as parallel-plate capacitors and tuners (Bushyagers & Tenzeris, 2002;Bushyager et .al 2003;Bushyager, Mc Garvey & Tenzer 2000). They used finite-difference time-domain technique (FDTD) or its variant MRTD, with adaptive gridding to tackle the problem of large aspect ratio and moving boundary conditions (see section 4).…”

Section: Introductionmentioning

confidence: 99%

Micromachining Techniques for Fabrication of Micro and Nano Structures

Kahrizi¹

2012

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Dr Kahrizi's research and teaching covers a wide spectrum in the fields of Material Sciences, Solid State Devices and Nano-science, which has resulted in numerous high quality journal and conference articles related to material sciences and fundamental issues concerning micro-and nano-structures. He is the Chair of IEEE, EDS, Montreal chapter and a member of Professional Engineers of Ontario. Dr Kahrizi is also a member of the Center for Applied Research XII Preface micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of MEMS and nanotechnology, this collection of articles can be used by scientists and researchers in the disciplines of engineering, material sciences, physics and chemistry

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A novel adaptive approach to modeling MEMS tunable capacitors using MRTD and FDTD techniques

Cited by 5 publications

References 4 publications

FDTD Analysis of Emission from Capacitor with Mechanical Motion

FDTD Analysis of Emission from Capacitor with Mechanical Motion

A Comprehensive High-Level Model for CMOS-MEMS Resonators

Micromachining Techniques for Fabrication of Micro and Nano Structures

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