2006 International Electron Devices Meeting 2006
DOI: 10.1109/iedm.2006.346930
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A Normally-off AlGaN/GaN Transistor with R<sub>on</sub>A=2.6m&amp;#x003A9;cm<sup>2</sup> and BV<sub>ds</sub>=640V Using Conductivity Modulation

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Cited by 37 publications
(26 citation statements)
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“…For power switching applications, the enhancement-mode (E-mode) transistors are highly preferred rather than the depletion-mode (D-mode) devices for the inherent fail-safe operation and simple gate driver circuitry. Despite the various technologies proposed to realize E-mode, GaN HFETs such as p-cap gate [2, 3], fluorine plasma ion implantation [4], and cascode technology [5], the MOSFET with partially or fully recessed gate is considered as a promising candidate because of its high-threshold voltage ( V TH ), large gate swing for improved fail-safe capability [6, 7], and low on-resistance [8]. Moreover, the MOS-gate is compatible with the mainstream gate driver ICs.…”
Section: Introductionmentioning
confidence: 99%
“…For power switching applications, the enhancement-mode (E-mode) transistors are highly preferred rather than the depletion-mode (D-mode) devices for the inherent fail-safe operation and simple gate driver circuitry. Despite the various technologies proposed to realize E-mode, GaN HFETs such as p-cap gate [2, 3], fluorine plasma ion implantation [4], and cascode technology [5], the MOSFET with partially or fully recessed gate is considered as a promising candidate because of its high-threshold voltage ( V TH ), large gate swing for improved fail-safe capability [6, 7], and low on-resistance [8]. Moreover, the MOS-gate is compatible with the mainstream gate driver ICs.…”
Section: Introductionmentioning
confidence: 99%
“…Substantial progress has been made in GaN power devices with the demonstration of off-state breakdown voltages of up to several kV12131415161718192021222324. The highest off-state breakdown voltage of 10.4 kV was achieved in AlGaN/GaN high electron mobility transistors (HEMTs) on sapphire with an on-resistance R on of 186 mΩ·cm 2 25.…”
mentioning
confidence: 99%
“…A depletion layer extends from p-n junction formed between the p-GaN and AlGaN barrier layer and depletes the 2-DEG electron, and then the normally-off operation can be obtained [7,8]. In this structure, the gate bias voltage more than GaN p-n built-in potential makes the gate current large.…”
Section: A Lateral Structure Dvicesmentioning
confidence: 96%