A nonevaporable low temperature activatable getter material

Abstract

Nonevaporable getters have been widely used for many years in sealed vacuum or controlled atmosphere devices. They are also finding applications in other fields, where specific characteristics are required and tailor-made getters are requested, in some cases sacrificing speed in favor of lower activation temperatures, or lower operating temperature, while still maintaining an adequate sorption capacity. With these objectives, a decade long research project was undertaken which involved investigation of Zr–V–Fe alloys. The physico-chemical properties and the gettering characteristics (speed and capacity) of this family of alloys for some main gases usually present in vacuum devices (H2, CO, N2) have therefore been studied in a range of activation temperatures of less than about 700°C. The equilibrium pressure of H2 on these materials has also been studied as a function of concentration and temperature in a range of pressures less than ∠10 Pa. The results obtained, showing the efficiency of this type of alloy as a getter in a range of activation temperatures of about 500°C, are also discussed in comparison with some other well-known getter materials.

The characterisation of non-evaporable getters by Auger electron spectroscopy: analytical potential and artefacts

“…The St 707 bulk getter alloy [9], commercially available from SAES getters, consists of Zr-70, V-24.6 and Fe-5.4 per cent by weight. The alloy is in the form of powder, which is pressed onto a constantan strip.…”

Gettering by CF4-Ar Plasma-Treated Titanium within Anodically Bonded Glass-Silicon Microcavities

“…As a result, the activation temperature is different for different gettering materials. Thus, various successful attempts have been made to lower this activation temperature by altering the getter composition, (6,7) but reports on the elimination of the native impurity layer before packaging are rare.…”

Nonevaporable getter films for ultrahigh vacuum applications

“…[9][10][11] Proof of its existence is given below. [9][10][11] Proof of its existence is given below.…”