A New Vacuum Friction Gauge Based on a Si Tuning Fork

Kurth, Steffen; Hiller, Karla; Zichner, N.; Mehner, Jan; Kaufmann, Christian; Iwert, Thomas; Biehl, Steffen; Dötzel, Wolfram; Geßner, Thomas

doi:10.1007/978-3-642-59497-7_119

Cited by 2 publications

(2 citation statements)

References 4 publications

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“…The basic concept of many sensor applications is to exploit the sensitivity of the resonant frequency of a certain resonator to changes of its mass 5, 10, 11 or elastic stiffness 25, 28, 39. Other concepts rely on the sensitivity of the quality factor Q 40–44, and thus relate to the damping properties. In order to achieve utmost sensitivity, the dependence of f res and Q on material and geometry parameters and on the ambient conditions has to be analysed.…”

Section: Electromechanical Modelling and Designmentioning

confidence: 99%

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

Brueckner

Niebelschuetz

Tonisch

et al. 2011

Physica Status Solidi (a)

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Wide-bandgap semiconductors represent an attractive option to meet the increasing demands of micro- and nano-electromechanical systems (MEMS/NEMS) by offering new functionalities, high stability, biocompatibility and the potential for miniaturization and integration. Here, we report on resonant MEMS and NEMS devices with functional layers of SiC, AlN and AlGaN/GaN heterostructures on different substrates, which have been investigated and analysed in the course of an interdisciplinary research focus programme of the German Research Foundation (DFG). The specific deposition and etching technologies necessary for the three-dimensional micro-structuring are explained. Further, the implementation of appropriate electromechanical transduction schemes is discussed. In case of SiC and AlN resonators, actuation and sensing was achieved by a magnetomotive scheme. A piezoelectric coupling scheme where the counter electrode is formed by the two-dimensional electron gas at the interface of the III/V heterostructure was realized for the AlGaN/GaN resonators. Thus, flexural and longitudinal vibration modes were excited and characterized using electrical and optical techniques. The measured key parameters of resonant frequency and quality factor are related to geometry, material and environmental parameters using analytical and finite element (FE) models. Finally, potential sensor applications are experimentally investigated

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Section: Electromechanical Modelling and Designmentioning

confidence: 99%

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

Brueckner

Niebelschuetz

Tonisch

et al. 2011

Physica Status Solidi (a)

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“…However, these cannot measure low pressures accurately if the comparison pressure is atmospheric, and attempts to use evacuated cavities to provide a low-pressure comparison have only been marginally successful [176,177]. The friction gauge, which uses damping of a resonator by residual gas as an indicator of pressure, has also had limited acceptance [178,179]. The most common MEMS vacuum gauges are thermopiles and Pirani gauges.…”

Section: Mems Vacuum Gaugesmentioning

confidence: 99%

MEMS mass spectrometers: the next wave of miniaturization

Syms

Wright²

2016

J. Micromech. Microeng.

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This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. Mass spectrometer systems containing MEMS sub-components are then described, applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.

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A New Vacuum Friction Gauge Based on a Si Tuning Fork

Cited by 2 publications

References 4 publications

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

MEMS mass spectrometers: the next wave of miniaturization

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