A New Technique for Measuring Poisson's Ratio of Mems Materials

Sharpe, W. N.; Vaidyanathan, K. Ranji; Yuan, Biao; Edwards, R. L.

doi:10.1557/proc-444-185

Cited by 13 publications

(10 citation statements)

References 8 publications

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“…From the earlier results partly answered by the use of microtesting systems, which of chemical-composition analyses and macrostructural and have been developed recently for the testing of microelectromicrostructural examination on foam blocks and foam struts, mechanical systems. [38,39,40] there are two possible factors that contribute to the aforementioned significant difference in the measured and predicted VI. SUMMARY AND CONCLUDING REMARKS foam strength.…”

Section: B Plastic-deformation Behavior Of the Foam Strutmentioning

confidence: 99%

An investigation of the microstructure and strength of open-cell 6101 aluminum foams

Zhou

Mercer

Soboyejo

2002

Metall Mater Trans A

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This article presents the results of a study of the microstructure and strength of open-cell 6101 aluminum alloy fans with three different levels of pore size (measured in pores per inch (PPI)). The macrostructures and microstructures of open-cell foam struts are characterized using a combination of optical and scanning electron microscopy (SEM). The compositions of the individual phases are also determined via energy-dispersive spectroscopy (EDS). The variations in strut microhardness are then measured using Vickers microindentation techniques. Following the measurement of the mechanical properties of foams, a modified model is used to estimate the relative density from measured strut dimensions. The mechanisms of compressive deformation are then elucidated before presenting a discussion on unit-cell modeling, strut plastic deformation, and the relationships between strut microstructure and microhardness.

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Section: B Plastic-deformation Behavior Of the Foam Strutmentioning

confidence: 99%

An investigation of the microstructure and strength of open-cell 6101 aluminum foams

Zhou

Mercer

Soboyejo

2002

Metall Mater Trans A

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“…by Sharpe et al [9], the side support strips of the specimen needs to be cut by a diamond saw after gluing the grip ends into tester. Such a process could damage the test film.…”

Section: Advances In Safety and Structural Integrity 2005mentioning

confidence: 99%

Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch

Park

Lee

Kim³

2006

SSP

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This paper presents high cycle fatigue properties of a Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480.0μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and –0.1514, respectively.

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“…Many previous studies have described methods to measure the mechanical properties of thin films (Vinci and Baker 2002;Sharpe et al 1996;Nowick and Berry 1972). The results obtained from different measurement techniques vary widely for nominally identical samples, due to difficulties associated with each technique (Vinci and Baker 2002;Sharpe et al 1996).…”

Section: Introductionmentioning

confidence: 99%

“…The results obtained from different measurement techniques vary widely for nominally identical samples, due to difficulties associated with each technique (Vinci and Baker 2002;Sharpe et al 1996). For example, the microbeam bending test uses nano-indentation to measure the relationship between applied force and deflection, with direct contact between the indenter tip and the surface of the sample.…”

Section: Introductionmentioning

confidence: 99%

Measurement of static and dynamic mechanical behavior of micro and nano-scale thin metal films: using micro-cantilever beam deflection

2011

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We present the results of a novel micro-beam deflection test used to investigate the static and dynamic mechanical behavior of submicron-thick metal films. The method demonstrated in this study allows researchers to observe the motion of micro and nano-scale thin films responding to electrostatic loads, by means of laser reflection measurements at frequency rates of up to 500 Hz. Researchers fabricated a supporting frame and a novel triangular shaped ‘‘paddle'' beam designed to provide uniform plane stress distribution while undergoing deflection. A simple geometric calculation, based on cantilever deflection, enabled the degree of strain to be determined, which in turn provided the Young's modus for aluminum film of a given thickness. We also studied the dynamic behavior using the dynamic frequency response of the beam, generated by electrostatic forces under various loads and vacuum pressure conditions. Our results showed that air damping has a significant influence on the free damping behavior of specimens, and only a minor influence on damping frequency. We determined the loss angle and frequency using sweep frequency and free damping methods, which were very consistent with paddle resonant frequencies. The loss angle obtained from a simple silicon micro-beam was 2.001 9 10-4_using the free damping method and 2.23 9 10-4_using the sweep frequency method. The dynamic response loss mechanism measured in this experiment provides incentive for the further study of grain boundary motion and dislocation motion in thin films

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A New Technique for Measuring Poisson's Ratio of Mems Materials

Cited by 13 publications

References 8 publications

An investigation of the microstructure and strength of open-cell 6101 aluminum foams

An investigation of the microstructure and strength of open-cell 6101 aluminum foams

Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch

Measurement of static and dynamic mechanical behavior of micro and nano-scale thin metal films: using micro-cantilever beam deflection

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