Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch

In this study, fatigue tests were performed for NiCo alloy which is commonly used in probe tips of test machines of semiconductors. The smooth specimens were fabricated by MEMS process including electro-plating process on a single-side polished 6 inches (100) silicon wafer. The NiCo thin film consists of about 66.2 % Ni and 33.8 % Co. The specimen is 2000 lm long, 9 lm thick and 100 lm wide. The tests were performed using a novel test procedure, a structure of the specimen is easy to manipulate, align and grip a thin-film and a test machine proposed by the authors. The closed-loop feedback control of the magnetic-electric actuator allowed load-controlled and high cycle fatigue tests with 5 Hz frequency, in ambient environment and with a stress ratio of R = 0.1. The fatigue strength coefficient and exponent were 1324 MPa and -0.0558, respectively. In a fatigue test of thin film, it is difficult to perform the fatigue test at R = -1. However, the result of the fatigue test at R = -1 should be required when fatigue life prediction is performed under variable loading. Therefore, in this study, the modified Goodman method, Gerber method and Soderberg method were considered to investigate which method is most reasonable when mean stress is considered.

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A study on the fatigue behaviour of electro‐plated NiCo thin film for probe tip applications

Park¹,

Chun

Kim

et al. 2009

Materialwissenschaft Werkst

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Research Trends for Mechanical Characterization of MEMS Materials in Korea: Research Needs and New Developments

Kim

Lee

Choa

2008

IEEJ Transactions Elec Engng

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The mechanical properties of microelectromechanical system (MEMS) materials are the basic parameters for designing MEMS devices and evaluating their reliability. The methods used to measure them, however, are not yet well established, and several unresolved issues require further investigation. In this paper, we introduce recent work on the mechanical characterization of MEMS materials in Korea with an emphasis on research needs and new developments. After a description of the research needs of MEMS industries, research activities on tensile and fatigue tests are introduced. Because of a strong interest in simpler test methods in Korea, their concepts and technical issues are described, especially for indentation, strip‐bending, and pillar compression tests. Some techniques based on atomic force microscope (AFM) are also introduced as new research activities. © 2008 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

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Tensile and high cycle fatigue test of Al–3% Ti thin films

Park

Myung

Kim

2008

Sensors and Actuators A: Physical

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Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch

Cited by 3 publications

References 7 publications

A study on the fatigue behaviour of electro‐plated NiCo thin film for probe tip applications

A study on the fatigue behaviour of electro‐plated NiCo thin film for probe tip applications

Research Trends for Mechanical Characterization of MEMS Materials in Korea: Research Needs and New Developments

Tensile and high cycle fatigue test of Al–3% Ti thin films

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