2011
DOI: 10.1088/0268-1242/26/9/095005
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A new partial SOI-LDMOSFET with a modified buried oxide layer for improving self-heating and breakdown voltage

Abstract: In this paper, for the first time, we propose a partial silicon-on-insulator (P-SOI) lateral double-diffused metal-oxide-semiconductor-field-effect-transistor (LDMOSFET) with a modified buried layer in order to improve breakdown voltage (BV) and self-heating effects (SHEs). The main idea of this work is to control the electric field by shaping the buried layer. With two steps introduced in the buried layer, the electric field distribution is modified. Also a P-type window introduced makes the substrate share t… Show more

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Cited by 43 publications
(6 citation statements)
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References 26 publications
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“…According to equations (1), (2) and (14) and boundary condition (3), we can get the potential expression at any point of the device by using the formula…”
Section: ( ) ( )mentioning
confidence: 99%
See 1 more Smart Citation
“…According to equations (1), (2) and (14) and boundary condition (3), we can get the potential expression at any point of the device by using the formula…”
Section: ( ) ( )mentioning
confidence: 99%
“…s the most widely used lateral power device, SOI LDMOS devices combine SOI technology, microelectronic technology and power electronics technology [1]. With its unique isolation performance, small leakage, fast speed and low power consumption, it has always occupied a unique advantage in high-performance single-chip power integration technology, and has been rapidly developed in the past decade [2][3]. The new high-speed, high-integration, low-power switching circuit and power amplifier circuits required by various power conversion and energy processing devices are core devices based on SOI LDMOS devices [4].…”
Section: Introductionmentioning
confidence: 99%
“…The devices are simulated using two-dimensional ATLAS software [10] with SiC material parameters [11][12][13]. In order to achieve more realistic results, several models are activated in simulation, including the 'SRH' model for Shockley-Read-Hall recombination, the 'Print' model for verifying models and material parameters, the 'Conmob' model for standard concentration-dependent mobility, the 'Fldmob' model for parallel electric field-dependent mobility, the 'Fermi Dirac' model for statistics and the 'Impact Selb' model for impact ionization [14]. Figure 2(a) shows the breakdown voltages with respect to the double recessed gate length (L drg ) in the DS-DRG and SS-DRG structures in a fixed double recessed gate thickness (T drg = 0.05 μm) at V GS = −1 V conditions.…”
Section: Device Structurementioning
confidence: 99%
“…It means, at the interface of the extended drain and channel, a new electric field peak creates which reduces the main peak at the interface of source-channel. [15][16][17][18][19] So, the carriers in the channel could not obtain the sufficient energy for reaching to the gate oxide. Therefore, the leakage current reduces significantly in the proposed structure.…”
mentioning
confidence: 99%