A new method to determine the mechanical resonance frequency, quality factor and charging in electrostatically actuated MEMS

Kalicinski, Stanislaw; Tilmans, H.A.C.; Wevers, Martine; Wolf, Ingrid De

doi:10.1109/memsys.2008.4443741

Cited by 10 publications

(5 citation statements)

References 8 publications

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“…Furthermore, the oxidation causes a considerable shift of frequency at fixed temperature, which poses limits to overall accuracy [193]. Charging of the oxide has been observed, which causes spring softening of the resonator and can detune the resonance frequency as a result [194]. Therefore, the charging effect might also have consequences for the aging behavior of the resonator when a bias voltage is applied to the resonator over prolonged periods of time [195].…”

Section: Resonator Stability Temperature Drift and Agingmentioning

confidence: 99%

A review of MEMS oscillators for frequency reference and timing applications

Beek¹,

Puers²

2011

J. Micromech. Microeng.

386

219

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MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable timing devices that can rival the electrical performance of well-established quartz-based oscillators. In this review, a description is given of the key properties of a MEMS resonator that determine the overall performance of a MEMS oscillator. Piezoelectric, capacitive and active resonator transduction methods are compared and their impact on oscillator noise and power dissipation is explained. An overview is given of the performance of MEMS resonators and MEMS-based oscillators that have been demonstrated to date. Mechanisms that affect the frequency stability of the resonator, such as temperature-induced frequency drift, are explained and an overview is given of methods that have been demonstrated to improve the frequency stability. The aforementioned performance indicators of MEMS-based oscillators are benchmarked against established quartz and CMOS technologies.

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Section: Resonator Stability Temperature Drift and Agingmentioning

confidence: 99%

A review of MEMS oscillators for frequency reference and timing applications

Beek¹,

Puers²

2011

J. Micromech. Microeng.

386

219

View full text Add to dashboard Cite

show abstract

“…Kalicinski et al showed that such charging effects can highly affect the resonance frequency [7]. However, the resonance frequency can also be directly affected by charging of a dielectric near or on the MEMS/NEMS.…”

Section: Figurementioning

confidence: 99%

“…An example is given in Fig. Line: Fit of model [7] to the points giving the mechanical resonant frequency f reso and V shift . The drift in resonance frequency (measured at 10V) is monitored in a vacuum chamber during more than 200 hours, without a DC stressing voltage applied to the device (during region A as indicated in Fig.…”

Section: Figurementioning

confidence: 99%

Methods to Measure Mechanical Properties of NEMS and MEMS: Challenges and Pitfalls

et al. 2009

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“…Although the zero charge state (∆V = 0) cannot be observed in a given resonator that has charge built-in, the polarity dependent splitting of the frequency-bias curve should still be seen. In recently published work the use of frequency-bias curves to extract the uncharged mechanical resonance frequency has been discussed [9].…”

Section: Modeling Charge Effectsmentioning

confidence: 99%

Observations of Fixed and Mobile Charge in Composite Mems Resonators

Bahl

Melamud

Kim

et al. 2008

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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This paper investigates dielectric charge in oxide-coated composite-beam silicon electrostatic resonators. The effects of charge in the oxide layers on resonant frequency are theoretically modeled. Evidence for the presence of both fixed and mobile charge is presented through experimental studies. It is shown that the motion of charge is controllable through the bias voltage applied to the resonator. These studies are relevant for improving the reliability of non-contacting MEMS where dielectrics may be present such as timing references, inertial sensors, and optical actuators.

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A new method to determine the mechanical resonance frequency, quality factor and charging in electrostatically actuated MEMS

Cited by 10 publications

References 8 publications

A review of MEMS oscillators for frequency reference and timing applications

A review of MEMS oscillators for frequency reference and timing applications

Methods to Measure Mechanical Properties of NEMS and MEMS: Challenges and Pitfalls

Observations of Fixed and Mobile Charge in Composite Mems Resonators

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