2004
DOI: 10.1016/j.jcrysgro.2003.11.009
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A new approach to performing equilibrium surface reaction calculations and its application to predicting growth of gallium nitride

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Cited by 6 publications
(2 citation statements)
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“…MOVPE simulation of GaN, InGaN, AlN, and AlGaN will be discussed in the following chapters using computational fluid dynamics (CFD) hereafter. The used code is CFD-ACE+ (ESI, France) [13] with the nitride-MOVPE database (Wavefront, Japan) [12]. The nitride-MOVPE database includes the reaction parameters for each modified Arrhenius equation, the molecular parameters such as Lennard Jones parameters, Sutherland's law coefficients, specific heat coefficients, and the high-temperature material parameters such as the optical absorption coefficient spectra and the specific heats.…”
Section: Simulation and Experimentsmentioning
confidence: 99%
“…MOVPE simulation of GaN, InGaN, AlN, and AlGaN will be discussed in the following chapters using computational fluid dynamics (CFD) hereafter. The used code is CFD-ACE+ (ESI, France) [13] with the nitride-MOVPE database (Wavefront, Japan) [12]. The nitride-MOVPE database includes the reaction parameters for each modified Arrhenius equation, the molecular parameters such as Lennard Jones parameters, Sutherland's law coefficients, specific heat coefficients, and the high-temperature material parameters such as the optical absorption coefficient spectra and the specific heats.…”
Section: Simulation and Experimentsmentioning
confidence: 99%
“…In parallel efforts to the advancement of epitaxial growth techniques, theoretical treatments intended to describe epitaxy in ways based on thermodynamics and kinetics have been progressing rapidly, from a simple classical phenomenological treatment to an advanced numerical treatment, as the performance of available computing systems rises steadily [16][17][18]. Theoretical treatments of epitaxy cover a wide range of relevant topics that include surface morphology, surface free energy, chemical potential, equilibrium crystal shape, surface wetting, nucleation, and dislocations, etc.…”
Section: Epitaxy In Nanometer-scalementioning
confidence: 99%