A monolithic capacitive pressure sensor with pulse-period output

Sander, C.; Knutti, James W.; Meindl, J.D.

doi:10.1109/isscc.1980.1156130

Cited by 19 publications

(17 citation statements)

References 3 publications

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“…Our discrete version of a complete implantable RF telemetry system for cardiac monitoring using PV sensor, Figure 18 (shown with a LiPo micro-battery), is integrated into a cube shaped volume of about 13.5 mm a side, which amounts to 2.475 cm 3 and it weights 2.67 g without the battery. The top two PCB modules in the stack are used for PV sensor interface circuit, which are followed down by RF transceiver, microprocessor, and power supply/regulator PCB modules.…”

Section: Rf Telemetry Systemmentioning

confidence: 99%

“…Therefore, it is essential to collect simultaneous data related to both blood pressure (P) and volume (V ) of a heart on a beat-to-beat basis. To that end, one of the first micromachined (MEMS) type of P sensors suitable for blood pressure monitoring was reported in [3], and soon after Baan et al [4,5] followed by reporting the development of a catheter with the embedded conductance-based V sensor. Today, these two types of sensors are commercially available as a single-package dual-sensor device that is small enough to be implanted into a mouse heart [6,7].…”

Section: Introductionmentioning

confidence: 99%

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Implantable RF telemetry for cardiac monitoring in the murine heart: a tutorial review

Sobot

2013

J Embedded Systems

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Research and development of implantable RF telemetry systems intended specifically to enable and support cardiac monitoring of genetically engineered small animal subjects, rats and mice in particular, has already gained significant momentum. This article presents the state of the art review of experimental cardiac monitoring telemetry systems, with strong accent on the systems designed to work with a dual pressure-volume conductance-based catheter sensor. These commercially available devices are already small enough to fit inside a left-ventricle of a mouse heart. However, if the complete system is to be fully implanted and the subject allowed to freely move inside a cage, the mouse's small body size sets harsh constrains on the size and power consumption of the required electronics. Consequently, significant portion of the research efforts is directed towards the development of low-volume and -power electronics, as well as RF energy harvesting systems that are required to serve as the energy source to the implanted telemetry instead of the relatively very bulky batteries.

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Section: Rf Telemetry Systemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Implantable RF telemetry for cardiac monitoring in the murine heart: a tutorial review

Sobot

2013

J Embedded Systems

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“…First explorative research of capacitive microdevices made using silicon technology was initiated in the early 1980s (8)(9)(10)(11). These initial studies have demonstrated that capacitive devices exhibit superior properties from their piezoresistive competitors in terms of pressure sensitivity, scalability, manufacturing simplicity, as well as process variation tolerance.…”

Section: The Capacitive Approachmentioning

confidence: 99%

Capacitive Microsensors for Biomedical Applications

Tsoukalas¹,

Chatzandroulis²,

Goustouridis³

2006

Encyclopedia of Medical Devices and Instrumentation

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The use of reliable, high performance miniature sensors in the medical field is of growing importance for patient health monitoring. Batch sensor fabrication, as this has been introduced by Integrated Circuit (IC) manufacturing, is an efficient way to produce silicon sensors with desirable characteristics. Since microsensors combine small size with electrical and mechanical principles of operation they constitute together with microactuators what is usually called Microelectromechanical Systems (MEMS). These components are mainly made from silicon and other related materials to explore existing know‐how and infrastructure of silicon technology. All of the above factors have allowed for fast growth of the microsensor field during the last years. This article focuses on physical microsensors used in the medical field that are based on the capacitive approach.

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“…Real world capacitive pressure sensor design includes moving charges, potential surfaces and partially conducting surfaces [15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32]. For the accurate calculation of field and current to produce a capacitive pressure sensor, Maxwell equation is used.…”

Section: Introductionmentioning

confidence: 99%

Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System

Bhol¹

2017

EAS

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Abstract:Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.

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A monolithic capacitive pressure sensor with pulse-period output

Cited by 19 publications

References 3 publications

Implantable RF telemetry for cardiac monitoring in the murine heart: a tutorial review

Implantable RF telemetry for cardiac monitoring in the murine heart: a tutorial review

Capacitive Microsensors for Biomedical Applications

Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System

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