A Mode-Matching ¿¿ Closed-Loop Vibratory-Gyroscope Readout Interface with a 0.004°/s/¿Hz Noise Floor over a 50Hz Band

Ezekwe, C.D.; Boser, Bernhard E.

doi:10.1109/isscc.2008.4523316

Cited by 42 publications

(34 citation statements)

References 13 publications

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“…This noise level compares favorably with other recently published gyroscopes [3,[21][22][23]. The presented design techniques are also fully compatible with mode-matching techniques such as in [23].A modified design that combines these techniques could achieve an even lower noise level. We do not have the equipment to perform an accurate temperature characterization.…”

Section: Gyroscope Characteristicssupporting

confidence: 66%

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

et al. 2009

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In this paper we describe the system architecture and prototype measurements of a MEMS gyroscope system with a resolution of 0.025The architecture makes extensive use of control loops, which are mostly in the digital domain. For the primary mode both the amplitude and the resonance frequency are tracked and controlled. The secondary mode readout is based on unconstrained Σ∆ force-feedback, which does not require a compensation filter in the loop and thus allows more beneficial quantization noise shaping than prior designs of the same order. Due to the force-feedback, the gyroscope has ample dynamic range to correct the quadrature error in the digital domain. The largely digital set-up also gives a lot of flexibility in characterization and testing, where system identification techniques have been used to characterize the sensors. This way, a parasitic direct electrical coupling between actuation and readout of the mass-spring systems was estimated and corrected in the digital domain. Special care is also given to the capacitive readout circuit, which operates in continuous time.

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Section: Gyroscope Characteristicssupporting

confidence: 66%

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

et al. 2009

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“…It has been demonstrated that the bias drift is a crucial factor that affects the measurement precision of a MEMS gyroscope. Therefore, to estimate and compensate for the bias drift is an important aspect for enhancing the performance of MEMS gyroscope along with improvement of sensors itself [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Noise Reduction of MEMS Gyroscope Based on Direct Modeling for an Angular Rate Signal

et al. 2015

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Abstract:In this paper, a novel approach for processing the outputs signal of the microelectromechanical systems (MEMS) gyroscopes was presented to reduce the bias drift and noise. The principle for the noise reduction was presented, and an optimal Kalman filter (KF) was designed by a steady-state filter gain obtained from the analysis of KF observability. In particular, the true angular rate signal was directly modeled to obtain an optimal estimate and make a self-compensation for the gyroscope without needing other sensor's information, whether in static or dynamic condition. A linear fit equation that describes the relationship between the KF bandwidth and modeling parameter of true angular rate was derived from the analysis of KF frequency response. The test results indicated that the MEMS gyroscope having an ARW noise of 4.87°/h 0.5 and a bias instability of 44.41°/h were reduced to 0.4°/h 0.5 and 4.13°/h by the KF under a given bandwidth (10 Hz), respectively. The 1σ estimated error was reduced from 1.9°/s to 0.14°/s and 1.7°/s to 0.5°/s in the constant rate test and swing rate test, respectively. It also showed that the filtered angular rate signal could well reflect the dynamic characteristic of the input rate signal in dynamic conditions. The presented algorithm is proved to be effective at improving the measurement precision of the MEMS gyroscope. OPEN ACCESSMicromachines 2015, 6 267

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“…System models and controller designs for closed-loop Σ-∆ and adaptive force-feedback electronics have been reported [3,4], however, there is not sufficient study in the literature for analog and digital force-feedback controller design procedure. An effective controller design based on analytical methods requires a baseband equivalent model of the sense mode dynamics.…”

Section: Introductionmentioning

confidence: 99%

A new baseband equivalent model for sense mode dynamics and its effects on force-feedback controller design for MEMS gyroscopes

Eminoglu

Alper

Akın

2011

2011 IEEE SENSORS Proceedings

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This paper introduces a new baseband equivalent model for the sense mode dynamics of a MEMS gyroscope providing a more accurate force-feedback controller design applicable to high-performance sensors with a small frequency separation between drive and sense modes. This new baseband equivalent model for sense dynamics correctly models the step response of the system allowing both "true prediction of the system bandwidth", with an error less than 1%, and "proper control of the transient behavior" such as ringing, settling time, etc. It has also been demonstrated that the designed force-feedback controller based on the new model improves the angle random walk and bias stability performance of a MEMS gyroscope by a factor of 9 and 3, respectively, compared to the same controller architecture design based on the conventional over-simplified sense dynamic model.

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A Mode-Matching ¿¿ Closed-Loop Vibratory-Gyroscope Readout Interface with a 0.004°/s/¿Hz Noise Floor over a 50Hz Band

Cited by 42 publications

References 13 publications

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

Noise Reduction of MEMS Gyroscope Based on Direct Modeling for an Angular Rate Signal

A new baseband equivalent model for sense mode dynamics and its effects on force-feedback controller design for MEMS gyroscopes

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