A dual mass vibratory gyroscope sensor demonstrates the quadrature frequency modulated (QFM) operating mode, where the frequency of the circular orbit of a proof mass is measured to detect angular rate. In comparison to the mode-matched open loop rate mode, the QFM mode receives the same benefit of improved SNR but without the penalties of unreliable scale factor and decreased bandwidth. A matched pair of gyroscopes, integrated onto the same die, is used for temperature compensation, resulting in 6 ppb relative frequency tracking error, or an Allan deviation of 370 deg/hr with a 70 kHz resonant frequency. The integrated CMOS electronics achieve a capacitance resolution of 0.1 zF/rt-Hz with nominal 6 fF sense electrodes.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.