A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry

Gottfried-Gottfried, R.; Budde, Wolfgang; Jahne, R.; Heinz, Kuehn; Sauer, B.; Ulbricht, Steffen; Wende, U.

doi:10.1016/s0924-4247(97)80001-5

Cited by 48 publications

(11 citation statements)

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“…The early FSs, developed as high sensitivity, high resolution, and high accuracy magnetic sensors mainly for astrophysics and geophysics applications [ 6 , 7 , 8 , 9 , 10 ], had large and heavy sensor heads with solid ferromagnetic core and high turn number copper wire-wound coils, focusing on precision at the expense of weight and power consumption. Since more than two decades ago [ 22 ], several miniaturized and integrated solutions have been proposed, aiming at minimizing dimensions, weight, and power consumption without overlooking the objectives of high sensitivity, wide linear range, and low noise. In accordance with the geometry of the coils, they can be divided into two main families: 3D type and planar type.…”

Section: Miniaturized Fluxgate Sensorsmentioning

confidence: 99%

“…In accordance with the geometry of the coils, they can be divided into two main families: 3D type and planar type. The former, called microsolenoid fluxgate sensors (MSFS) hereinafter, make use of a thin ring [ 23 ] or rectangular/racetrack shaped magnetic core (ring-type) [ 20 , 24 , 25 , 26 , 27 , 28 ] or two (Vacquier-Förster-type) [ 14 , 22 , 29 ] cores with micro-machined or PCB 3D coils wound around the thin cores. In [ 30 ], a double-axis microsolenoid FS is described, which implements a Förster-type sensor on the two leg pairs of a closed square shaped core.…”

Section: Miniaturized Fluxgate Sensorsmentioning

confidence: 99%

“…The coils and the core of miniaturized FSs are manufactured with PCB technology [ 23 , 25 , 27 , 33 , 35 , 38 , 39 , 40 , 41 ], allowing the construction sensors of several tens of millimeters or with different CMOS-compatible MEMS techniques [ 20 , 22 , 24 , 26 , 28 , 29 , 30 , 32 , 36 , 37 ], such as sputtering, electroplating, lithography, electron-beam evaporation, etc., which allow for achieving a further reduction in dimensions up to few millimeters. In [ 31 ], a conventional micro-printing technique is, instead, adopted to produce a mechanically flexible sensor.…”

Section: Miniaturized Fluxgate Sensorsmentioning

confidence: 99%

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Design of Integrated Micro-Fluxgate Magnetic Sensors: Advantages and Challenges of Numerical Analyses

Marconato

2022

Sensors

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Miniaturization and on-chip integration are major lines of research in many branches of science and technology developments, undoubtedly in sensor technology. Fluxgate magnetometers are very sensitive, and accurate magnetic sensors able to detect weak fields both AC and DC, which in recent years saw a great effort in minimizing their dimensions, weight, and power consumption. The physics behind the fluxgate principle is rather complex and makes simulations difficult and only partially used in the literature. The limited physical access to micro sensors for measurements and the need to optimize the entire integrated system, including the sensor geometry and the excitation and readout circuits, make numerical analyses particularly useful in the design of miniaturized sensors. After a thorough review of the miniaturized solutions proposed so far, the present paper examines in detail the possibility of adopting a model based approach for designing miniaturized fluxgate sensors. The model of the fluxgate effect of two different technologies proposed in the literature has been implemented to benchmark simulation results with real data. In addition to the advantages for an optimized design, the implementation and computational challenges of the numerical analyses are precisely outlined.

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Section: Miniaturized Fluxgate Sensorsmentioning

confidence: 99%

Section: Miniaturized Fluxgate Sensorsmentioning

confidence: 99%

Section: Miniaturized Fluxgate Sensorsmentioning

confidence: 99%

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Design of Integrated Micro-Fluxgate Magnetic Sensors: Advantages and Challenges of Numerical Analyses

Marconato

2022

Sensors

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“…In accordance with the shape of magnetic core, fluxgate sensors fall into the categories of single core, dual core, ring-type core, racetracktype core and other structural forms (Kawahito et al 1996;Liakopouls and Ahn 1999;Ripka et al 2001). Because of its relatively simple process, only plane fluxgate probes were integrated with integrated interface circuit in known productions of MEMS integrated fluxgate sensors (Baschirotto et al 2007;Gottfried-Gottfried et al 1996). However, due to smaller size and lower noise, 3D fluxgate sensors should be the researching focus at present and in the future.…”

Section: Introductionmentioning

confidence: 99%

MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils

et al. 2009

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As a classic Earth magnetic field sensor, fluxgate magnetic sensors have great potential applications in many fields. This paper presents a new 3D micro-solenoid fluxgate magnetic sensor based on the MEMS technique. The excitation coils were placed vertically to the detection coils on the chip plane, around a rectangular shaped magnetic core. Polyimide was used to insulate coils and magnetic core. Width of copper conductor lines is 50 lm, and line space is 50 lm. The design of such fluxgate magnetic sensor followed second harmonic signal selecting method. Phase-lock amplifier was used to get second harmonic signal output by detection coils. The linear range of 0-80 lT with sensitivity of 6.7 V/T was achieved from the fabricated sensor with excitation current of 430 mA and the operational frequency of 40 KHz. As the excitation current was 470 mA, linear range of 0-50 lT with sensitivity of 21.7 V/T was achieved.

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“…The main advantage of fluxgate sensor is its high temperature stability, while the same parameters for any other solid-state magnetic sensors are at least 10 times worse. Recently, several fluxgate sensors using silicon micro-machining technologies have been demonstrated [4][5][6]. They have reported that it has the attractive features of small size, light weight, high sensitivity, high resolution, integration of signal processing circuits and so on.…”

Section: Introductionmentioning

confidence: 99%

Micro-fluxgate sensor incorporating solenoid coil and BCB dielectric

Park

Shim

Hwang

et al.

Proceedings of IEEE Sensors, 2004.

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In this paper, miniaturized fluxgate sensor with high sensitivity is presented by increasing the permeability of magnetic material. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and closely coupled solenoid excitation and pick-up coils. In order to induce magnetic anisotropy, the magnetic core (permalloy) was electroplated under the external magnetic field of 7000 gauss. We designed three types of fluxgate sensors with the change of magnetic core size and turn numbers of solenoid coil. Excellent linear responses of these sensors were obtained with more than 117 V/T sensitivity over the range of -200 T to + 200 T . And the size of the smallest micro-fluxgate sensor was about 1.3 0.7 mm 2 excluding pad region.

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A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry

Cited by 48 publications

References 1 publication

Design of Integrated Micro-Fluxgate Magnetic Sensors: Advantages and Challenges of Numerical Analyses

Design of Integrated Micro-Fluxgate Magnetic Sensors: Advantages and Challenges of Numerical Analyses

MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils

Micro-fluxgate sensor incorporating solenoid coil and BCB dielectric

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