A miniature high-Q grating-mode-type SAW resonator and a wide-band 1-GHz SAW-VCO for mobile communications

Isobe, Aki; Hikita, M.; Asai, K.; Sumioka, A.

doi:10.1109/mwsym.2000.863329

Cited by 5 publications

(2 citation statements)

References 2 publications

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“…When the width of the electrode is half of the finger pitch, it is referred to as a uniform IDT, having the highest energy density. To reduce acoustic energy leakage and the impact of Rayleigh clutter, the thickness of the aluminum electrode was set to 0.1 λ [ 30 ], where λ represents the wavelength of the SAW, and in this model, λ = 4a. The specific parameters of the simulation model are illustrated in Figure 2 b and summarized in Table 3 .…”

Section: Device Design and Simulation Methodsmentioning

confidence: 99%

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Li,

Zhou,

Huang

et al. 2023

Micromachines

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Love surface acoustic wave (L-SAW) sensors are miniaturized, easy to integrate, and suitable for detection in liquid environments. In this paper, an L-SAW sensor with a thin Si3N4-SiO2 double-covered layer was proposed for samples with small mass loads. The output response, phase velocity of the acoustic wave, and the mass sensitivity were analyzed using the finite element method (FEM). The simulation results show that the Si3N4 layer with high wave velocity greatly weakens the limitation of SiO2 on the phase velocity. The phase velocity can reach about 4300 m/s, which can increase the frequency shift when the same mass load is applied. Within a certain range, the mass sensitivity of the sensor is enhanced with the increase in the total thickness of the waveguiding layer and the thickness ratio of Si3N4 in the double-covered layer. When the thickness ratio is 1:2, the peak value of the mass sensitivity of the sensor is approximately 50% higher than that achieved with only the SiO2 waveguiding layer. The surface average stress of the delay line region follows the same trend as the mass sensitivity. The increase in mass sensitivity is the result of the heightened stress on the sensor surface. This L-SAW sensor, featuring a double-covered waveguiding layer, demonstrates high sensitivity and a simple structure. The simulation results lay a foundation for the design and manufacture of SAW sensors.

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Section: Device Design and Simulation Methodsmentioning

confidence: 99%

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Li,

Zhou,

Huang

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…Several methods have been proposed to improve factors: bond-wire inductors [24], surface acoustic-wave (SAW) resonators with high 's [25], oxidized porous silicon substrate for thick insulation layer [26], and bulk micromachining for suspended inductor structures [27]. From these methods, highinductors can be achieved, but it is very difficult to monolithically integrate these inductors with on-chip VCO circuits.…”

Section: Mems Inductorsmentioning

confidence: 99%

Fully integrated low phase-noise VCOs with on-chip MEMS inductors

Park

Choi

Yoon

et al. 2003

IEEE Trans. Microwave Theory Techn.

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Structure with thin SiOx/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices

Shen

et al. 2021

Ultrasonics

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A miniature high-Q grating-mode-type SAW resonator and a wide-band 1-GHz SAW-VCO for mobile communications

Cited by 5 publications

References 2 publications

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Fully integrated low phase-noise VCOs with on-chip MEMS inductors

Structure with thin SiOx/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices

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