A miniature confocal optical microscope with MEMS gimbal scanner

Murakami, Kenji; Murata, A.; Suga, T.; Kitagawa, Haruaki; Kamiya, Y.; Kubo, Mitsunori; Matsumoto, Kazuya; Matsubara, Hiroshi; Katashiro, M.

doi:10.1109/sensor.2003.1215385

Cited by 22 publications

(14 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Murakami at Olympus Optical Co. developed a prototype 3.3-mm diameter confocal endomicroscope to pass through a working channel of an endoscope using a single MEMS electrostatic gimbal scanning mirror and an aspherical objective lens. 84, 85 Other two-axis scanning mirror designs used in confocal endomicroscopy include an electrostatically driven torsional silicon micro-mirror with electroplated nickel hinges and frame, 40 a gimbaled scanner using electrostatic combdrive actuators, 64, 79, 109 and a thermally actuated non-resonant scanner fabricated using silicon-on-insulator multi-user MEMS processes (SOIMUMPS). 98 In addition to micromirrors, other microdevices to mechanically scan the fiber, such as unimorph cantilevers, have also been used for scanning.…”

Section: Instrumentationmentioning

confidence: 99%

Confocal Endomicroscopy: Instrumentation and Medical Applications

et al. 2011

View full text Add to dashboard Cite

Advances in fiber optic technology and miniaturized optics and mechanics have propelled confocal endomicroscopy into the clinical realm. This high resolution, non-invasive imaging technology provides the ability to microscopically evaluate cellular and sub-cellular features in tissue in vivo by optical sectioning. Because many cancers originate in epithelial tissues accessible by endoscopes, confocal endomicroscopy has been explored to detect regions of possible neoplasia at an earlier stage by imaging morphological features in vivo that are significant in histopathologic evaluation. This technique allows real-time assessment of tissue which may improve diagnostic yield by guiding biopsy. Research and development continues to reduce the overall size of the imaging probe, increase the image acquisition speed, and improve resolution and field of view of confocal endomicroscopes. Technical advances will continue to enable application to less accessible organs and more complex systems in the body. Lateral and axial resolutions down to 0.5 μm and 3 μm, respectively, field of view as large as 800×450 μm, and objective lens and total probe outer diameters down to 350 μm and 1.25 mm, respectively, have been achieved. We provide a review of the historical developments of confocal imaging in vivo, the evolution of endomicroscope instrumentation, and the medical applications of confocal endomicroscopy.

show abstract

Section: Instrumentationmentioning

confidence: 99%

Confocal Endomicroscopy: Instrumentation and Medical Applications

et al. 2011

View full text Add to dashboard Cite

show abstract

“…Figure3 shows a schematic drawing of the confocal system [6] . The scanning head consists of a thin tube including an objective lens, an electrostatic 2-D MEMS scanner and the tip of an optical fiber.…”

Section: Miniature Confocal Microscopementioning

confidence: 99%

A miniature confocal optical scanning microscope for endoscopes

Murakami

2005

SPIE Proceedings

View full text Add to dashboard Cite

We have developed a unique miniature confocal optical scanning microscope as an endoscopic application and successfully obtained a real time image. The confocal microscope can observe the longitudinal direction of a scanning head including the electrostatic 2-D MEMS scanner and an aspherical objective lens. Waterproof packaging of the scanning head is accomplished. The MEMS scanner and the objective lens in the head are assembled precisely and compactly. The MEMS scanner has a gimbal structure and the mirror flatness and Q factor are controlled by a stress-controlled silicon nitride. The scan angle of 12deg., the mirror flatness of 80nm(PV) and the mirror reflectance of over 85% are achieved. The diameter and length of the scanning head are 3.3mm and 8mm, respectively and it can insert into a channel of the endoscope. The lateral resolution of 0.5um, the depth resolution of 2.9um, the field of view of 100*75um and over 20/s of frame rate needed for the in-vivo inspection was achieved.

show abstract

“…Miniature scanner technologies have been employed in 1) scanning confocal microscopy, a powerful optical imaging method that can achieve sub-cellular resolution in real time [1][2][3][4], 2) portable, lightweight, low-power, inexpensive projection video displays with high information content [5][6][7][8][9], and 3) near-eye virtual displays like head-mounted displays (HMD) [10][11][12][13][14]. Most miniature scanner technologies utilize MEMS scanner mirrors.…”

Section: Introductionmentioning

confidence: 99%

2D MEMS electrostatic cantilever waveguide scanner for potential image display application

Lin

Wang

2015

MATEC Web of Conferences

View full text Add to dashboard Cite

Abstract. This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width) to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm) with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input). A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5mm beam diameter is observed at the focal plane. The transmission efficiency is low (~10%) and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.

show abstract

A miniature confocal optical microscope with MEMS gimbal scanner

Cited by 22 publications

References 2 publications

Confocal Endomicroscopy: Instrumentation and Medical Applications

Confocal Endomicroscopy: Instrumentation and Medical Applications

A miniature confocal optical scanning microscope for endoscopes

2D MEMS electrostatic cantilever waveguide scanner for potential image display application

Contact Info

Product

Resources

About